A new paradigm will be presented for the low temperature fabrication of passive (conductor, capacitor) and active (field effect transistor) electrical components on the flexible polymer substrate. A drop-on-demand (DOD) ink-jetting system was used to print gold nano-particles suspended in carrier solvents, insulating polymer material and a semiconductor polymer to fabricate passive and active electrical components on flexible polymer substrates. Low power, short-pulsed laser ablative material removal enabled finer electrical components to overcome the resolution limitation of inkjet deposition. Temporally modulated laser irradiation was utilized to locally evaporate the carrier solvent as well as sinter gold nano-particles, thereby yielding conductors of resistivity just slightly higher than bulk gold. Highly selective multi-layered gold nanoparticle film processing was demonstrated using the SPLA-DAT (selective pulsed laser ablation by differential ablation threshold) scheme. This approach enabled definition of narrow channels for FETs (field effect transistors). High performance OFETs (organic field effect transistors) were demonstrated after the final step of semiconductor polymer deposition. Further reduction of feature size has been accomplished via nanoimprinting. The fundamental mechanisms of the nanoparticle sintering process have been investigated by both Molecular Dynamics (MD) simulations as well as in-situ probing.

1.
Burns
,
S. E.
,
Cain
,
P.
,
Mills
,
H.
,
Wang
,
J.
&
Sirringhaus
,
H
(
2003
)
Inkjet printing of polymer thin-film transistor circuits
,
MRS bulletin
829
,
829
834
.
2.
Wang
,
J. Z.
,
Zheng
,
Z. H.
,
Li
,
H.W.
,
Huck
W.T.S.
,
Sirranghaus
,
H.
(
2003
)
Dewetting of conducting polymer droplets on patterned surfaces
,
Nature Materials
3
,
171
176
.
3.
Bieri
,
N. R.
,
Chung
,
J.
,
Haferl
,
S. E.
,
Poulikakos
,
D.
,
Grigoropoulos
,
C. P.
(
2003
)
Microstructuring by printing and laser curing of nanoparticle solutions
,
Applied Physics Letters
,
82
(
20
)
3529
3531
.
4.
Chung
,
J.
Ko
,
S.
,
Bieri
,
N. R.
,
Grigoropoulos
,
C. P.
,
Poulikakos
,
D.
(
2004
)
Conductor microstructures by laser curing of printed gold nanoparticle ink
,
Applied Physics Letters
,
84
(
5
),
801
803
.
5.
Chung
J
,
Bieri
N. R.
,
Ko
,
S.
,
Grigoropoulos
,
C. P.
,
Poulikakos
D.
(
2004
)
In-tandem deposition and sintering of printed gold nanoparticle inks induced by continuous Gaussian laser irradiation
,
Applied Physics A-Materials science and processing
79
(
4-6
),
1259
1261
.
6.
Ko
,
S.H.
,
Pan
,
H.
,
Grigoropoulos
,
C.P.
,
Luscombe
,
C.K.
,
Fréchet
,
J.M.J.
,
Poulikakos
,
D.
(
2007
)
Air stable high resolution organic transistors by selective laser sintering of inkjet printed metal nanoparticle
,
Applied Physics Letters
,
90
,
141103
.
7.
Ko
,
S.H.
,
Choi
,
Y.
,
Hwang
,
D.
,
Chung
,
J.
,
Grigoropoulos
,
C.P.
,
Poulikakos
,
D.
(
2006
)
Nanosecond laser ablation of gold nanoparticle films
,
Applied Physics Letters
,
89
,
141126
.
8.
Ko
,
S.H.
,
Chung
,
J.
,
Pan
,
H.
,
Grigoropoulos
,
C.P.
,
Poulikakos
,
D.
(
2007
)
Fabrication of multilayer passive and active electric components on polymer using inkjet printing and low temperature laser processing
,
Sensors and Actuators A: Physical
,
134
,
161
168
.
9.
Buffat
,
P. A.
,
Borel
,
J. P.
(
1976
)
Size effect on the melting temperature of gold particles
,
Phys. Rev. A.
,
13
(
6
),
2287
2298
.
10.
Hostetler
,
M. J.
 et al (
1998
)
Alkanethiolate Gold Cluster Molecules with Core Diameters from 1.5 to 5.2 nm: Core and Monolayer Properties as a Function of Core Size
,
Langmuir
14
,
17
30
.
11.
Murphy
,
A. R.
 et al (
2005
)
Synthesis, Characterization, and Field-Effect Transistor Performance of Carboxylate-Functionalized Polythiophenes with increased air stability
.
Chem. Mater.
17
,
4892
4899
.
12.
Bäuerle
,
D.
, (
2000
)
Laser Processing and Chemistry
,
Springer
,
New York
.
13.
Lawrence
,
D.
,
Kohler
,
J.
,
Brollier
,
B.
,
Claypole
,
T.
,
Brugin
,
T.
(
2004
) Printed Organic and Molecular Electronics, eds
Gamota
,
D.
,
Brazis
,
P.
,
Kalyanasundaram
,
K.
,
Zhang
,
J.
,
Kluwer Academic Publishers
,
NewYork
, pp
161
346
.
14.
Ercolessi
,
F.
,
Parrinello
,
M.
,
Tosatti
,
E.
(
1998
)
Simulation of gold in the glue model, Philosophical Magazine A: Physics of Condensed Matter: Structure
,
Defects and Mechanical Properties
,
58
(
1
),
213
216
.
15.
Hawa
,
T.
,
Zachariah
,
M.R.
(
2005
)
Coalescence kinetics of bare and hydrogen-coated silicon nanoparticles: A molecular dynamics study
,
Physical Review B
71
,
16543
.
16.
Zachariah
,
M. R.
,
Carrier
,
M.
(
1999
)
Molecular dynamics computation of gas-phase nanoparticle sintering: a comparison with phenomenological models
,
J. Aerosol Sci.
30
(
9
),
1139
1151
.
17.
Ko
,
S.H.
,
Park
,
I.
,
Pan
,
H.
,
Grigoropoulos
,
C.P.
,
Pisano
,
A.P.
,
Luscombe
,
C.K.
,
Fréchet
,
J.M.J.
(
2007
)
Direct Nanoimprinting of Metal Nanoparticles for Nanoscale Electronics Fabrication
,
Nanoletters
,
7
(
7
),
1869
1877
.
This content is only available via PDF.
You do not currently have access to this content.