The manufacturing and application of micro-optical elements are constantly evolving toward miniaturization, integration, and intelligence and have important applications in holographic displays, optical imaging, laser processing, information processing, and other fields. Ultrafast lasers, with their ultrashort pulse width, extremely high peak power, high processing resolution, small thermal influence zone, and nondestructive material processing advantages, have become an important processing method for preparing micro-optical elements. However, the laser output from the laser usually has a Gaussian distribution, with limitations in spatial and temporal energy and shape distribution, making it difficult to meet the requirements of processing efficiency and quality, which poses new challenges to ultrafast laser manufacturing technology. Therefore, by shaping the ultrafast laser beam and regulating nonlinear optical effects, the optimization and adjustment of the beam shape can be achieved, thus improving the quality and efficiency of micro-optical element processing. Ultrafast laser beam shaping technology provides a new method for the manufacture of micro-optical elements. This article first introduces the commonly used manufacturing methods for micro-optical elements. Second, from the perspective of the temporal domain, spatial domain, and spatiotemporal domain, the basic principles, methods, and existing problems of ultrafast laser beam shaping are summarized. Then, the application of these shaping technologies in the preparation of micro-optical elements is elaborated. Finally, the challenges and future development prospects of ultrafast laser beam shaping technology are discussed.
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August 2023
Review Article|
August 16 2023
Application of ultrafast laser beam shaping in micro-optical elements
Zhihao Qu
;
Zhihao Qu
(Conceptualization, Investigation, Writing – original draft, Writing – review & editing)
1
School of Mechanical and Automotive Engineering, Qingdao University of Technology
, Qingdao 266520, China
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Shufeng Sun
;
Shufeng Sun
a)
(Conceptualization, Funding acquisition, Methodology, Resources, Supervision)
1
School of Mechanical and Automotive Engineering, Qingdao University of Technology
, Qingdao 266520, China
a)Author to whom correspondence should be addressed; electronic mail: sunshufeng@qut.edu.cn
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Jin Wang
;
Jin Wang
(Formal analysis, Methodology, Resources)
1
School of Mechanical and Automotive Engineering, Qingdao University of Technology
, Qingdao 266520, China
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Mingming Jiang
;
Mingming Jiang
(Conceptualization, Data curation, Formal analysis, Investigation, Methodology)
1
School of Mechanical and Automotive Engineering, Qingdao University of Technology
, Qingdao 266520, China
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Fengyun Zhang
;
Fengyun Zhang
(Formal analysis, Methodology, Resources, Supervision)
1
School of Mechanical and Automotive Engineering, Qingdao University of Technology
, Qingdao 266520, China
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Xi Wang
;
Xi Wang
(Data curation, Investigation, Resources, Visualization)
1
School of Mechanical and Automotive Engineering, Qingdao University of Technology
, Qingdao 266520, China
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Jing Shao
;
Jing Shao
(Formal analysis, Investigation, Resources)
1
School of Mechanical and Automotive Engineering, Qingdao University of Technology
, Qingdao 266520, China
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Guanglei Liang
;
Guanglei Liang
(Conceptualization, Data curation, Formal analysis, Supervision, Writing – review & editing)
1
School of Mechanical and Automotive Engineering, Qingdao University of Technology
, Qingdao 266520, China
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Pingping Wang
Pingping Wang
(Conceptualization, Formal analysis, Investigation, Supervision)
1
School of Mechanical and Automotive Engineering, Qingdao University of Technology
, Qingdao 266520, China
2
Intelligent Manufacturing College of Qingdao Huanghai University, Qingdao Huanghai University
, Qingdao 266427, China
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a)Author to whom correspondence should be addressed; electronic mail: sunshufeng@qut.edu.cn
J. Laser Appl. 35, 031202 (2023)
Article history
Received:
April 05 2023
Accepted:
July 27 2023
Citation
Zhihao Qu, Shufeng Sun, Jin Wang, Mingming Jiang, Fengyun Zhang, Xi Wang, Jing Shao, Guanglei Liang, Pingping Wang; Application of ultrafast laser beam shaping in micro-optical elements. J. Laser Appl. 1 August 2023; 35 (3): 031202. https://doi.org/10.2351/7.0001033
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