Since the trend with many sectors of industry is toward miniaturisation (electronics, photonics, biomedical), laser micromachining is playing an increasingly important role in the manufacturing of high-tech and consumer products. Research in laser micromachining has to address many facets of the effort, including novel laser sources development, basic laser-matter interaction, and the exploration of new processes and devices. Photonics Research Ontario (PRO), a Centre of Excellence of the Government of Ontario, is tackling laser micromachining research on all of these fronts by funding basic research in Ontario universities, R&D projects with industry, and collaborative efforts bringing together both industry and academia. This paper presents the PRO/MMO state-of-the-art Laser Micromachining Facility and highlights some of the research conducted by PRO principal investigators.

1.
P.R.
Herman
,
K.
Beckley
,
B.
Jackson
,
K.
Kurosawa
,
D.
Moore
,
T.
Yamanishi
, and
J.
Yang
,
SPIE Proc
.
2992
,
86
(
1997
).
2.
P.R.
Herman
,
J.
Yang
,
K.
Kurosawa
, and
T.
Yamanishi
,
SPIE Proc
.
2991
,
10
(
1997
).
3.
K.
Rubahn
and
J.
Ihlemann
,
Appl. Surf Sci
127-129
,
881
(
1998
).
4.
K.O.
Hill
,
Y.
Fujii
,
D.C.
Johnson
, and
B.S.
Kawasaki
,
Appl. Phys. Lett
.
32
,
647
(
1978
).
5.
R.
Kashyap
,
Fiber Bragg Gratings
,
Academic Press
(
New York
,
1999
).
6.
P.R.
Herman
,
B.
Chen
,
D.J.
Moore
, and
M.
Canaga-Retnam
,
MRS Proc
.
236
,
53
(
1992
).
7.
S.
Kuper
and
M.
Stuke
,
Appl. Phys. B
44
,
199
(
1987
).
8.
A.C.
Tam
,
J. L.
Brand
,
D.C.
Cheng
, and
W.
Zapka
,
Appl. Phys. Lett
.
55
,
2045
(
1989
).
10.
D.
Du
,
X.
Liu
,
G.
Korn
,
J.
Squier
, and
G.
Mourou
,
Appl. Phys. Lett
.
64
,
3071
(
1994
).
11.
B.C.
Stuart
,
M.D.
Feit
,
A.M.
Rubenchik
,
B.W.
Shore
, and
M.D.
Perry
,
Phys. Rev. Lett
.
74
,
2248
(
1995
).
12.
H.
Varel
,
D.
Ashkenasi
,
A.
Rosenfeld
,
R.
Herrmann
,
F.
Noack
, and
E.E.B.
Campbell
,
Appl. Phys
. A
62
,
293
, (
1996
).
13.
W.
Kautek
,
J.
Kruger
,
M.
Lenzner
,
S.
Sartania
,
C.
Spielmann
, and
F.
Krausz
,
Appl. Phys. Lett
.
69
,
3146
(
1996
).
14.
S.
Ameer-Beg
,
W.
Perrie
,
S.
Rathbone
,
J.
Wright
,
W.
Weaver
, and
H.
Champoux
,
Appl. Surf. Sci
.
127
129
,
875
(
1998
).
15.
K. M.
Davis
,
K.
Miura
,
N.
Sugimoto
, and
K.
Hirao
,
Opt. Lett
.
21
,
1729
(
1996
).
16.
E.N.
Glezer
,
M.
Milosavljevic
,
L.
Huang
,
R.J.
Finlay
,
T.-H.
Her
,
J.P.
Callan
, and
E.
Mazur
,
Opt. Lett
.
21
,
2023
(
1996
).
17.
D.
Ahkenasi
,
H.
Varel
,
A.
Rosenfeld
,
S.
Henz
,
J.
Hermann
, and
E.E.B.
Campbell
,
Appl. Phys. Lett
.
72
,
1442
(
1998
).
18.
P.R.
Herman
,
R.
Marjoribanks
,
M.
Nantel
,
X.
Gu
,
J.
Kalbfleisch
,
J.
Long
,
M.
Lukacs
, and
T.
Oettl
,
SPIE proc
.
3618
(
1999
).
19.
R.S.
Marjoribanks
,
F.W.
Budnik
,
L.
Zhao
,
G.
Kulcsar
,
M.
Stanier
, and
J.
Mihaychuk
,
Opt. Lett
.
18
,
361
(
1993
).
20.
D.A.
Parthenopoulos
and
P.M.
Rentzepis
,
Science
245
,
843
(
1989
).
21.
E.N.
Glezer
,
M.
Milosavljevic
,
L.
Huang
,
R.J.
Finlay
,
T.H.
Her
,
J.P.
Callan
, and
E.
Mazur
,
Opt. Lett
.
21
,
2023
(
1996
).
This content is only available via PDF.
You do not currently have access to this content.