The compact size high peak power Q-switched CO2 laser was developed using the intense pulsed discharge excitation and the high speed chopper. This Q-switched CO2 laser was applied to the polymers ablation and its characteristics was compared with that of the conventional TEA laser ablation. The 20 - 100 μ m depth ablative etching of PET with well defined edge were successfully obtained when the strong absorbed 9R(20) line at 1078.57 cm−1 was irradiated. It was found the ablation characteristics by a Q-switched laser was almost same as that by a TEA laser.

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