In the industrial production of electrical, optical and micro-mechanical components progress in miniaturisation requires improved adjusting techniques. Sub-micrometer accuracy adjustment must be obtained within a second and the accuracy should be stable for many years. All methods that are presently applied for micro-manipulation are time-consuming and tedious and require very expensive equipment. They also often can not be automated. The present paper shows a new technology, laser beam forming, for adjustment purpose in the submicron range. Two examples for applications will be given. A new field of activity for laser technology is described.
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© 1998 Laser Institute of America.
1998
Laser Institute of America
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