Phenomenal market growth is predicted for laser micromachining applications in the next decade as microelectronic and medical industries begin to rely on microprocessing as a critical manufacturing process. In this paper we discuss techniques used for micropattterning by direct write machining, presenting how the groove quality and depth are effected by source fluence and sample speed for both highly and poorly absorbing polymers.

1.
Elizabeth K.
Illy
,
Michael J.
Withford
,
Daniel J.W
Brown
and
James A.
Piper
: ‘
Micromacgining
Photonics Spectra
March
1998
.
2.
D.W
Coutts
and
D.J.W.
Brown
Production of high average power UV by second harmonic and sum frequency generation from copper vapour lasers
’,
IEEE J.Quant. Elect
Vol.
1
, no
3
, pp
768
778
, Sept
1995
.
3.
R
Trickett
,
MJ
Withford
,
DJW
Brown
, ‘
Nonlinear frequency conversion of copper vapour lasers at elevated pulse repetition frequencies
Proceedings IQEC ’96 paper FE5
.
4.
Elizabeth K.
Illy
,
Michael J.
Withford
,
Daniel J.W
Brown
and
James A.
Piper
, ‘
Effects of High Pulse Repetition Frequency on the Ablation of Polymers
’,
Proceedings ICALEO ’96
, LIA.
5.
F C
Burns
and
S R
Cain
, ‘
The effect of pulse repetition rate on laser ablation of polyimide and polymethylmethacrylate-based polymers
J. App. Phys
vol
29
, pp
1349
1355
,
1996
.
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