The application of diode pumped solid state laser radiation for producing three dimensional microstructures is of great interest to materials, which are difficult to structure by conventional machining methods. For obtaining controlled processing and processing results the material removal, the available precision and roughness must be determined. Strategies that permit an efficient manufacturing of structures smaller than 100 μm in ceramics (SiC, Si3N4) and hard metals (WC) are developed. The influence of repetition rate, pulse energy, overlap and processing gas atmosphere on material removal, roughness, geometry and recast layer are discussed.
REFERENCES
1.
Jandeleit
, J.
, P.
Rußbüldt
, H.-G.
Treusch
and E.W.
Kreutz
. “Micromachining by picosecond laser radiation: fundamental and applications
.“ Lasers in Material Processing, Laser ’97, SPIE 3097
: (1997
) pp. 252
–259
.2.
Chryssolouris
, G.
(1991
). “Laser Machining-Theory and Practice
“. Springer
, New York
. pp. 228
–241
.3.
Jandeleit
, J.
, A.
Horn
, E.W.
Kreutz
and R.
Poprawe
, “Micromachining of metals and ceramics by nano- and picosecond laser radiation
.“ Proc. Micromachining & Microfabrication, SPIE 3223
: (1997
) pp. 34
–42
.4.
Suzakki
, Y.
and A.
Tachibana
. “Measurement of the μm sized radius of a Gaussian laser beam using the scanning knife edge
.“ Appl. Opt.
Vol. 14
: (1975
) pp. 2809
–2812
.5.
Krigesmann
, J.
(1991
). “Technische Keramische Werkstoffe
“. Deutscher
Wirtschaftsdienst, Köln
. Vol. 6
.6.
Weichenhain
, R.
, A.
Horn
, J.
Jandeleit
and E.W.
Kreutz
, to be published.
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© 1998 Laser Institute of America.
1998
Laser Institute of America
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