Laser micromachining substitutes conventional techniques in cases where area modifications, repair of prefabricated devices or tools are necessary. Systems technology is essentially limited to standard optical arrangements having inflexible beam apertures for image formation. The micromachning process is determined not only by the laser source, but also by the optical elements for beam shaping, guidance and workpiece handling. This paper will describe the potential of a new improved flexible mask for the development in laser beam formation for the micromachining of glass, ceramic and polymer materials in imaging mode which offer spot sizes of a few micrometers.

1.
A.
Heuberger
(
1991
).
Mikromechanik
,
Springer Verlag
,
Berlin
, Heidelberg, New York.
2.
H. K.
Tönshoff
,
J.
Mommsen
(
1992
).
Process of generating 3-D microstructures using excimer lasers
.
Laser Optoelectronics
.
24
(
1
)
64
67
.
3.
C.
Buerhop
,
B.
Blumenthal
,
R.
Weissmann
,
N.
Lutz
,
S.
Biermann
(
1990
).
Glass surface treatment with excimer and CO2 lasers
.
Appl. Surf. Sci.
46
430
434
.
4.
J.
Ihlemann
,
B.
Wolf
,
P.
Simon
(
1992
).
Nanosecond and femtosecond excimer laser ablation of fused silica
.
Appl. Phys
.
A54
,
363
368
.
5.
M. T.
Duigan
,
G. P.
Behrmann
(
1997
).
Rapid fabrication of diffractive optical elements by excimer laser micro-machining
.
SPIE
Vol.
2991
.
6.
F.
Von Alvensleben
,
M.
Gonschior
,
H.
Kappel
,
P.
Heekenjann
(
August
8,
1995
).
Laser micro-machining
.
Optics & Photonics News
.
23
27
.
7.
H. K.
Tönshoff
,
D.
Hesse
,
H.
Kappel
,
J.
Mommsen
(
1995
).
Excimer laser systems
.
Manufacturing Systems
Vol.
24
395
401
.
8.
H. K.
Tönshoff
,
H.
Kappel
,
P.
HeekenJann
(
July
1996
).
Micro-machining with DUV lasers
.
Laser Applications Engineering, VIII International Conference
.
9.
H. J.
Kahlert
,
U.
Sowada
,
D.
Basting
(
1988
).
Excimer lasers for material Processing: results and industrial applications
. SPIE Vol.
1023
Excimer lasers and Applications
.
10.
M.
Goller
,
N.
Lutz
,
M.
Geiger
(
1993
).
Micro-machining of ceramics with excimer laser radiation
.
Journal of the European Ceramic Society
.
12
.
315
321
.
This content is only available via PDF.
You do not currently have access to this content.