The effect of ion beam irradiation on the adhesion strength of Mo films was examined using an ion beam assisted excimer laser PVD apparatus. We also examined the effect of energy density, target-substrate distances, and target rotation on the surface morphology. Spectroscopic diagnosis for a Mo plume was performed. The adhesion of the Mo film was improved by ion beam irradiation which removes a thin surface layer of the substrate. Smooth surface Mo films without droplets were successfully formed under laser fluence conditions of less than 0.25MJ/m2, a target-substrate distance greater than 40mm, and with target rotation. Mo films with a b.c.c. structure show the (110) preferred orientation of <110>. The Mo plume generated by laser ablation is in an excited state containing Mo+.
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ICALEO '95: Proceedings of the Laser Materials Processing Conference
November 13–16, 1995
San Diego, California, USA
ISBN:
978-0-912035-53-6
PROCEEDINGS PAPER
Deposition of Mo films by ion beam assisted excimer laser PVD method
Tetsuo Yano;
Tetsuo Yano
Shikoku National Industrial Research Institute, AIST, MITI
, 2217-14 Hayashi-cho, Takamatsu, Kagawa 761-03, JAPAN
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Toshihiko Odie;
Toshihiko Odie
Shikoku National Industrial Research Institute, AIST, MITI
, 2217-14 Hayashi-cho, Takamatsu, Kagawa 761-03, JAPAN
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Masafumi Yoneda;
Masafumi Yoneda
Shikoku National Industrial Research Institute, AIST, MITI
, 2217-14 Hayashi-cho, Takamatsu, Kagawa 761-03, JAPAN
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Munehide Katsumura
Munehide Katsumura
Shikoku National Industrial Research Institute, AIST, MITI
, 2217-14 Hayashi-cho, Takamatsu, Kagawa 761-03, JAPAN
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Published Online:
November 01 1995
Citation
Tetsuo Yano, Toshihiko Odie, Masafumi Yoneda, Munehide Katsumura; November 13–16, 1995. "Deposition of Mo films by ion beam assisted excimer laser PVD method." Proceedings of the ICALEO '95: Proceedings of the Laser Materials Processing Conference. ICALEO '95: Proceedings of the Laser Materials Processing Conference. San Diego, California, USA. (pp. pp. 251-259). ASME. https://doi.org/10.2351/1.5058916
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