Laser processing within the microelectronics industry has proven to be reliable, easily automated and cost effective. Well established production applications include thick and thin-film resistor trimming, part marking and link-cutting to implement redundancy on memory chips. With few exceptions, laser processing is the only way to attain the precision and speed required in production operations. More recent laser applications include laser writing of masks, direct writing in photo resist and micromachining of electronic packages. This paper will give an overview of each of these applications.
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© 1995 Laser Institute of America.
1995
Laser Institute of America
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