Titanium nitride (TiN) films are grown on Ti-6Al-4V substrates with a cw CO2 laser and precursor gas mixtures of TiCl4, H2, and N2. In situ diagnostic techniques are applied to study the kinetics of this laser chemical vapor deposition (LCVD) process. Pulsed dye laser induced fluorescence (LIF) spectroscopy is employed to obtain gas phase species concentrations at different instances relative to the processing laser. Multi-wavelength pyrometry is applied simultaneously to measure the substrate surface temperature. Post-processing materials analyses, namely, Stylus Profilometry and Auger Electron Spectroscopy yield growth rates and film compositions that are linked to the diagnostic results. Experiments are carried out for different laser powers and reactant gas pressures. Thus an empirical relationship between the growth rate and reactant partial pressures, the rate-controlling steps, and activation energy are determined.
REFERENCES
1.
O.
Conde
, J.
Mariano
, A. J.
Silvestre
, and R.
Vilar
, in Proc. 3rd European Conf. on Laser Treatment of Materials
, Eds. H. W.
Bergmann
and R.
Kupfer
, 145
(Sprechsal
, Coburg
, 1990
)2.
O.
Conde
, M. L. G.
Ferreira
, P.
Hochholdinger
, A. J.
Silvestre
, and R.
Vilar
, Appl. Surf. Sci.
54
, 130
(1992
)3.
O.
Conde
, A.
Kar
, and J.
Mazumder
, J. Appl. Phys.
72
, 754
(1992
)4.
V.
Hopfe
, A.
Tehel
, A.
Baier
, and J.
Scharsig
, Appl. Surf. Sci.
54
, 78
(1992
)5.
D.
Bauerle
, Chemical Processing with Lasers, Springer Ser. in Mat. Sci.
, Vol. 1
, (Springer
, Berlin
, 1986
)6.
D. J.
Ehrlich
and J. Y.
Tsao
, Laser Microfabrication: Thin Film Processes and Lithography
, (Academic
, Boston
, 1989
)7.
J. K.
Tison
and M. G.
Cohen
, Solid State Technol.
30
, 113
(1987
)8.
J. Y.
Tsao
, D. J.
Ehrlich
, D. J.
Silversmith
, and R. W.
Mountain
, IEEE Electr. Dev. Lett.
EDL-3
, 164
(1982
)9.
I. P.
Herman
, in Laser Processing and Diagnostics, ed. by D.
Bauerle
, Springer Ser. Chem. Phys.
Vol. 39
, 164
(Springer
, Berlin
, 1984
)10.
S.
Boughaba
and G.
Auvert
, Appl. Surf. Sci.
54
, 25
(1992
)11.
W. B.
Chou
, M. N.
Azer
, and J.
Mazumder
, J. Appl. Phys.
, 66
191
(1989
)12.
N.
Okada
, Y.
Katsumura
, and K.
Ishiguri
, Appl. Phys. A.
55
, 207
(1992
)13.
Y.
Suzuki
, Jpn. J. Appl. Phys.
28
, 920
(1989
)14.
K.
Mutoh
, Y.
Yamada
, T.
Iwabuchi
, and T.
Miyata
, J. Appl. Phys.
68
, 1361
(1990
)K.
Mutoh
, Y.
Yamada
, T.
Iwabuchi
, and T.
Miyata
Jpn. J. Appl. Phys.
31
, 1183
(1992
)15.
S.
Masataka
, S.
Seki
, Y.
Ishino
, H.
Nagata
, and Y.
Suzuki
, Jpn. J. Appl. Phys.
31
, 1219
, (1992
)16.
S. D.
Allen
, in Laser Applications in Materials Processing
, ed. by J. F.
Ready
, SPIE Vol. 198
, 49
(Bellingham
, 1979
)17.
W.
Krauter
, D.
Bauerle
, and F.
Fimberger
, Appl. Phys. A.
31
, 13
(1983
)18.
C. P.
Christenson
and K. M.
Lakin
, Appl. Phys. Lett.
32
, 254
, (1978
)19.
20.
T. F.
Deutsch
, in Laser Processing and Diagnostics, ed. by D.
Bauerle
, Springer Ser. Chem. Phys.
, Vol. 39
, (Springer
, Berlin
, 1984
)21.
P. K.
Boyer
, K. A.
Emery
, H.
Zarnani
, and G. J.
Collins
, Appl. Phys. Lett.
40
, 979
, (1984
)22.
23.
G.
Reisse
, F.
Gaensicke
, R.
Ebert
, U.
Illmann
, and H.
Johansen
, Appl. Surf. Sci.
54
, 84
(1992
), and other articles in the same volume24.
N.
Nakanishi
, S.
Mori
, and E.
Kato
, J. Electrochem. Soc.
137
, 322
(1990
)25.
Z. R.
Cao
, Y. S.
Du
, and H. F.
Miao
, Surf. Engr.
5
, 315
(1989
)26.
T.
Sadahiro
, T.
Cho
, and S.
Yamaya
, J. Jpn. Inst. Metals
41
, 542
(1977
)27.
A.
Kato
and N.
Tamari
, J. Cryst. Growth
29
, 55
(1975
)28.
29.
D. S.
Alderdice
, J. Mol. Spectry.
15
, 509
(1965
)30.
W.
Demtroder
, Laser Spectroscopy: Basic Concepts and Instrumentation, Spriger Ser. Chem. Phys.
5
(Springer
, Berlin
, 1981
)31.
S.
Svanberg
, Atomic and Molecular Spectroscopy: Basic Aspects and Practical Applications, Springer Ser. Atoms and Plasmas
6
(Springer
, Berlin
, 1991
)32.
A. C.
Eckbreth
, Laser Diagnostics for Combustion Temperature and Species, Energy and Engr. Sci. Ser.
7
(Abacus
, Tunbridge Wells, UK
, 1988
)33.
G. A.
Martin
, J. R.
Fuhr
, and W. L.
Wiese
, J. Phys. Chem. Ref. Data
17
, Suppl. 3
, 85
(1988
)34.
35.
R. M.
Lowe
and P.
Hannaford
, Z. Phys. D - Atoms, Molecules and Clusters
21
, 205
(1991
)36.
P.
Forsberg
, Physics Scripta
44
, 446
(1991
)37.
R. W. B.
Pearse
and A. G.
Gaydon
, The Identification of Molecular Spectra
, Fourth ed. (Chapman and Hall
, London
, 1976
)38.
M. W.
Chase
, Jr., C. A.
Davies
, J. R.
Downey
, Jr., D. J.
Frurip
, R. A.
McDonald
, and A. N.
Syverud
, JANAF Thermochemical Tables, Part II, Cr-Zr
, 3rd ed., J. Phys. Chem. Ref. Data
14
, Suppl. 1
, (1985
)39.
M. N.
Azer
, Ph. D. Thesis, University of Illinois at Urbana-Champaign
(1994
)40.
X.
Chen
, M. N.
Azer
, and J.
Mazumder
, in Laser and Materials Processing IV
, (TMS
, Warrendale, PA
, 1994
)41.
E. H.
Piepmeier
, Spectrochimica Acta
27B
, 431
(1972
)42.
J. W.
Daily
, Appl. Opt.
17
, 225
(1978
)43.
W. G.
Breiland
, M. E.
Coltrin
, and P.
Ho
, J. Appl. Phys.
59
, 3267
(1986
)44.
D. A.
Porter
and K. E.
Easterling
, Phase Transformations in Metals and Alloys
, p. 366
(Chapman and Hall
, London
, 1981
)45.
J. R.
Peterson
, J. Vac. Sci. Technol.
11
, 715
(1974
)46.
47.
M. S.
Kim
and J. S.
Chun
, Thin Solid Films
107
, 129
(1983
)48.
M. S.
You
, N.
Nakanishi
, and E.
Kato
, J. Electrochem. Soc.
138
, 1394
(1991
)49.
K. A.
Davis
, K.
Brezinsky
, and I.
Glassman
, Combustion Sci. Tech.
77
, 171
(1991
)50.
N.
Yoshikawa
, H.
Aikawa
, and A.
Kikuchi
, J. Jpn. Inst. Met.
56
, 1132
(1992
)
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