At the present time, lasers are being used in many microelectronics applications, and the use of lasers to repair photolithographic mask defects and deposition metal and polysilicon lines for discretionary interconnects in integrated circuit is beginning to receive attention. Despite the interest that exists for laser processing of IC’s, there are still many aspects of laser deposition technology that are not well understood. For example, it is unclear why the use of laser chemical vapor deposition (LCVD) to deposit thin films leads to deposition rate enhancement relative to conventional chemical vapor deposition (CVD). Also the observation of volcanic film profiles during LCVD is not well understood. While numerous models have postulated the factors affecting deposition rate and volcanic profiles, few experimental studies have been performed to study these phenomena.
REFERENCES
1.
Allen
, S. D.
, J. Appl. Phys
., Vol. 52
(1981
), pp. 6501
–6505
.2.
Kräuter
, W.
, D.
Bäuerle
, and F.
Fimberger
, Appl. Phys. A
, Vol. A31
(1983
), pp. 13
–18
.3.
Christenson
, C. P.
, and K. M.
Lakin
, Appl. Phys. Lett
, Vol. 32
(1978
), p. 254
.4.
Aoyagi
, Y.
, S.
Masuda
, and S.
Namba
, Appl. Phys. Lett
., Vol. 42
(1985
), p. 95
.5.
Deutsch
, T. F.
, in Laser Processing and Diagnostics ed., by D.
Bäuerle
, Springer Ser. Chem. Phys
., Vol. 39
, Springer
, Berlin
(1984
), p. 239
.6.
Boyer
, P. K.
, K. A.
Emery
, H.
Zarnani
, G. J.
Collins
, Appl. Phys. Lett
., Vol. 40
, (1984
), p. 979
.7.
8.
Bäuerle
, D.
, Chemical Processing with Lasers, Springer Ser. in Mat. Sci.
, Vol. 1
, Springer
, Berlin
(1986
).9.
Ehrlich
, Daniel J.
, and J. Y.
Tsao
, Laser Microfabrication: Thin Film Processes and Lithography
. Academic
, Boston
(1989
).10.
Ehrlich
, D. J.
, R. M.
Osgood
, and T. F.
Deutsch
, J. Vac. Sci. Technol
., Vol. 21
(1982
), pp. 23
–32
.11.
12.
Tison
, J.
K„ and M. G.
Cohen
, Solid State Technol
., Vol 30
(1987
), pp. 113
–114
.13.
Tsao
, J. Y.
, D. J.
Ehrlich
, D. J.
Silversmith
, and R. W.
Mountain
, IEEE Electr. Dev. Lett
., Vol. EDL-3
(1982
), pp. 164
–166
.14.
Herman
, I. P.
, in Laser Processing and Diagnostics ed., by D.
Bäuerle
, Springer Ser. Chem. Phys
., Vol. 39
, Springer
, Berlin
(1984
), pp. 396
–416
.15.
Jackson
, R. L.
, T. H.
Baum
, T. T.
Kodas
, D. J.
Ehrlich
, G. W., and P. B.
Comita
, in Laser Microfabrication; Thin Film Processes and Lithography
. Academic
, Boston
(1989
).16.
Lydtin
, H.
, Proceedings of the Third International Conference on Chemical Vapor Deposition
, ed., F. A.
Glaski
, (American Nuclear Society
, Hinsdale, IL.
, 1972
), pg. 121
.17.
Rytz-Froidevaux
, Y.
, R. P.
Salathé
, and H. H.
Gilgen
, Phys. Lett
., Vol 84
A (1981
), pp. 216
–218
.18.
Ehrlich
, D. J.
, and R. M.
Osgood
, Thin Solid Films
, Vol. 90
(1982
), pp. 287
–94
.19.
Bauerle
, D.
, P.
Irsigler
, G.
Leyendecker
, H.
Noll
, and D.
Wagner
, Appl. Phys. Lett
., Vol. 40
(1982
), pp. 819
–821
20.
van den Brekel
, C. H. J.
, Philips Res. Report
, Vol 32
(1977
), p. 118
,.21.
Ehrlich
, D. J.
, and J. Y.
Tsao
, J. Vac. Sci. Tech. B
, Vol. 1
(1983
), p. 969
–984
.22.
Herman
, I. P.
, Roderick A.
Hyde
, Bruce M.
McWilliams
, Andrew H.
Weisberg
, and Lowell L.
Wood
., in Laser Diagnostics and Photochemical Processing for Semiconductor Devices, eds. R. M.
Osgood
, S. R. J.
Brueck
, and H. R.
Schlossberg
, MRS
, Pittsburgh
(1983
), MRS Vol. 17
, pp. 9
–18
.23.
Krauter
, W.
, D.
Bauerle
, and F.
Fimberger
, Appl. Phys. A
, Vol. A31
(1983
), pp. 13
–18
.24.
Mcreary
, M. J.
, in, Proc. of Fifth Int. Conference on Chemical Vapor Deposition
, ed. J. M.
Blocher
, Buckinghamshire
(1975
), pp. 714
–725
.25.
Allen
. S. D.
, in Laser Applications in Laser Materials Processing, ed. J. F.
Ready
, SPIE Volume 198
, SPIE
, Bellingham
(1979
), pp. 49
–56
.26.
Moylan
, C. R.
, T. H.
Baum
, and C. R.
Jones
, Appl. Phys. A
, Vol. A40
(1986
).27.
Chou
, W. B.
, M. N.
Azer
, and J.
Mazumder
, J. Appl. Phys
., Vol. 66
(1989
), pp. 191
–195
.28.
Kodas
, T. T.
, T. H.
Baum
, and P. B.
Comita
, J. Appl. Phys
., 62
(1987
), pp. 281
–285
29.
Kodas
, Toivo T.
, Thomas H.
Baum
, and Paul
B.
Comita
, J.
of Cryst. Growth
(1988
), pp. 378
–382
.30.
Condé
, O
, M. L. G.
Ferreira
, P.
Hochholdinger
, A. J.
Silvestre
, and R.
Vilar
in Proceedings of the 3rd European Conference on Laser Treatment of Materials
, ed. by H. W.
Bergmann
and R.
Kupfer
, Sprechsal, Oburg
(1990
), p. 145
.31.
Allen
, S. D.
, S. M.
Copley
, and R. H.
Edwards
, Limiting Processes in LCVD
. DOE Final Report
, June 1983 - June 1984, DOE/ER/45012-01 (1984
).32.
Skouby
, D. C.
, and K. F.
Jensen
, J. Appl. Phys
., Vol. 63
(1988
), pp. 198
–206
.33.
Kar
, A.
, M. N.
Azer
, and J.
Mazumder
, J. Appl. Phys
., Vol 69
(1991
), pp..34.
Condé
, O
, A.
Kar
, and J.
Mazumder
, J. Appl. Phys
., Vol. 72
(1992
), pp. 754
–671
.35.
Zeiger
, H. J.
, and D. J.
Ehrlich
, J. Vac. Sci. Technol. B
, Vol. B7
(1989
), pp. 466
–480
.36.
Patnaik
, S.
, and R. A.
Brown
, J. Elec. Soc
., Vol. 135
(1988
), p. 697
.37.
Ward
, Timothy L.
, Toivo T.
Kodas
, and Robert L.
Jackson
, J. Appl. Phys
, Vol. 69
(1991
), pp. 1000
–1007
.38.
Kotecki
, David E.
, and Irving P.
Herman
, J. Appl. Phys.
, Vol. 64
(1988
), pp 4920
–4942
.39.
Zeiri
, Yehuda
, Uzi
Atzmony
, Joseph
Bloch
, and Robert
R.
Lucchese
, J.
Appl. Phys
., Vol. 69
(1991
), pp. 4110
–4115
.40.
Patnaik
, S.
, and R. A.
Brown
, J. Elec. Soc
., Vol. 135
(1988
), pp. 697
–706
.41.
Tsao
, J. Y.
, H. J.
Zeiger
, and D. J.
Ehrlich
, Surf. Sci.
, Vol. 160
(1985
), pp 419
–422
.42.
Kodas
, Toivo T.
, Thomas H.
Baum
, and Paul B.
Comita
, J. of Cryst. Growth
(1988
), pp. 378
–382
.43.
Allen
. S. D.
, in Laser Applications in Laser Materials Processing, ed. J. F.
Ready
, SPIE Volume 198
, SPIE
, Bellingham
(1979
), pp. 49
–56
.44.
Planck
, M.
, The Theory of Thermal Radiation
. Philadelphia
: The Blackiston Company
, 1914
.45.
Wien
, Willy
. Ann. Phy. ser. 3
, 58
(1896
), pp. 662
–669
.46.
Hyde
, E. P.
, F. E.
Cady
, and W. E.
Forsythe
., Astrophys. J.
, 42
(1915
), p. 294
.47.
Kostkowski
, H. J.
, and R. D.
Lee
, in Temperature: Its Measurement and Control in Science and Industry. Ed. Charles H.
Herzfeld
, New York
: Reinhold Publishing
, 1962
, p. 449
.48.
Bezemer
, J.
, Metrologia
, 10
(1974
), pp. 47
–52
.49.
50.
51.
Pasta
, M.
, G.
Ruffino
, P.
Soardo
, and G.
Toselli
, High Temp-High Press.
, 5
(1975
), p. 99.52.
53.
Andreic
, Zeijko
, Appl. Opt.
, 27
(1988
), pp. 4073
–4075
.54.
55.
Tsai
, B. K.
, R. L.
Shoemaker
. D. P.
DeWitt
, B. A.
Cowans
, Z.
Dardas
, W. N.
Delgass
, and G. J.
Dail
, Int. J. of Thermophysics
, 11
(1990
), pp. 269
–281
.56.
H. W.
Lo
, and A.
Compaan
, Phys. Rev. Lett.
, 44
(1980
), pp. 1605
–1607
.57.
Larson
, B. C.
, C. W.
White
, T. S.
Noggle
, and D.
Mills
, Phys. Rev. Lett.
, 48
(1982
), pp. 337
–340
.58.
Lompré
, L. A.
, J. M.
Liu
, H.
Kurz
, and N.
Bloembergen
, Appl. Phys. Lett.
, 43
(1983
), pp. 168
–170
.59.
Sturm
, J. C.
, P. V.
Schwartz
, and P. M.
Garone
, Appl. Phys. Lett.
, 56
(1990
), pp. 961
–963
.60.
Sturm
, J. C.
, and Casper M.
Reaves
, IEEE Trans. El. Dev.
, 39
(1992
), pp. 81
–88
.61.
Kodas
, Toivo T.
, Thomas H.
Baum
, and Paul B.
Comita
, J. Appl. Phys.
, 61
(1987
), pp. 2749
–2753
.62.
Lee
, Y. J.
, C. H.
Chou
, B. T.
Khuri-Yakub
, K.
Saraswat
, and M.
Moslehi
, in 1989 Ultrasonics Symposium.
63.
Karner
, C.
, A.
Mandel
, and F.
Träger
, Appl. Phys. A
: Solids and Surfaces
, 38
(1985
), pp. 19
–21
.64.
Kasuya
, A.
, and Y.
Nishina
, in Laser and Particle-Beam Chemical Processes on Surfaces
, eds. A. Wayne
Johnson
, Gary L.
Loper
, and T. W.
Sigmon
, Pittsburgh
, MRS
(1989
), MRS. Vol. 129
, pp 365
–370
.65.
Saenger
, Katherine L.
, and Julie
Gupta
, Appl. Opt.
, 30
(1991
), pp. 1221
–1226
.66.
Hunter
, Gordon B.
, Charly D.
Allemand
, and Thomas W.
Eager
, Opt. Eng.
, 24
(1985
), pp. 1081
–1085
.67.
Hunter
, Gordon B.
, Charly D.
Allemand
, and Thomas W.
Eager
, Opt. Eng.
, 25
(1986
), pp. 1222
–1231
.68.
Khan
, Mansoor A.
, Charly
Allemand
, and Thomas W.
Eager
, Rev. Sci. Instrum.
, 62
(1991
), pp. 392
–402
.69.
Khan
, Mansoor A.
, Charly
Allemand
, and Thomas W.
Eager
, Rev. Sci. Instrum.
, 62
(1991
), pp. 403
–409
.70.
Hiemaut
, Jean-Pol
, Rutger
Beukers
, Wilhelm
Heinz
, Raoul
Selfslag
, Michael
Hoch
, and Roland
Ohse
, High Temp.-High Pres.
, 18
(1986
), pp. 617
–625
.71.
Hiemaut
, Jean-Pol
, Rutger
Beukers
, Michael
Hoch
, Tsuneo
Matsui
, and Roland
Ohse
, High Temp.-High Pres.
, 18
(1986
), pp. 627
–633
.72.
Babelot
, Jean-François
, and Michael
Hoch
, High Temp.-High Press.
, 21
(1989
), pp. 79
–84
.73.
Hiemaut
, Jean-Pol
, Fumihiro
Sakuma
, and Claudio
Ronchi
, High Temp.-High Press.
, 21
(1989
), pp. 139
–148
74.
75.
76.
77.
Pettibone
, D. W.
, J. R.
Suarez
, and A.
Gat
, in Rapid Thermal Processing
, eds. Thomas O.
Sedgewick
, Thomas E.
Seidel
, and Bor-Yeu
Tsaur
, Pittsburgh
: Materials Research Society
(1986
), MRS Proc. #52
, pp. 209
–216
.78.
Delfino
, Michelangelo
, IEEE Trans. El. Devices
, 39
(1992
), pp. 89
–95
.79.
Hendricks
, Lloyd J.
, and Steven P.
Zobrist
, Appl. Opt.
, 20
(1981
), pp. 1880
–1883
.80.
Nason
, D. O.
, C. T.
Yen
, R. S.
Feigelson
, and W. A.
Tiller
, Rev. Sci.. Instrum.
, 61
(1990
), pp. 1024
–1028
.81.
Dupuy
, C. G.
, and J. E.
Hurst
, Jr, Rev. Sci. Instrum.
, Vol. 63
(1992
), pp. 3763
–3766
.82.
83.
Liesengang
, Gerard W.
, and Paul W.
Smith
, Appl. Opt.
, Vol. 21
(1982
), pp. 1437
–1444
.84.
Talmi
, Yair
, and Kenneth W.
Busch
, in Multichannel Image Detectors: Volume II. American Chemical Society
, New York
(1993
), ACS Symp. Ser.
236
, pp. 1
–29
.85.
Olesik
, John. W.
, and John P.
Walters
, in Multichannel Image Detectors: Volume II
. American Chemical Society
, New York
(1993
), ACS Symp. Ser.
236, pp. 31
–56
.86.
Azer
, Magdi N.
(unpublished).87.
Robertson
, A. R.
, J. Opt. Soc. Am.
, Vol. 58
(1968
), pp. 1528
–1535
.88.
Marquardt
, D. W.
, J. Soc. Ind. Appl. Math.
, Vol. 11
(1963
), pp. 431
–441
.89.
Bevington
, Philip R.
, Data Reduction and Error Analysis for the Physical Sciences
. New York
, McGraw-Hill
, 1969
, Chapter 11.90.
Azer
, M. N.
, and J.
Mazumder
(unpublished results).91.
Azer
, M. N.
, and X.
Chen
(unpublished results).92.
Sato
, Tsutomo
, Jap. J. Appl. Phys.
, Vol. 69
(1967
), pp 339
–347
.93.
Chen
, X.
, and J.
Mazumder
(see these proceedings).
This content is only available via PDF.
© 1994 Laser Institute of America.
1994
Laser Institute of America
You do not currently have access to this content.