Thin metal coatings are prepared by the Laser Pulse Vapor Deposition (LPVD), using an electro-optical Q-switched Nd:YAG-laser. The removal of the target material is measured with a microbalance, correlated with the different laser parameters and the conditions in the vacuum chamber. The formation of homogeneous metal coatings and their surfaces was investigated as a function of ablation parameters and laser parameters. It is shown the possibility to ablate particles smaller than one micron instead of molten droplets.

1.
M.
Bass
,
M.A.
Nassar
,
R.T.
Swimm
; (
1987
)
J. Appl. Phys.
61
(
3
),
1137
1144
2.
E. W.
Kreutz
,
M.
Krösche
,
H.
Sung
,
A.
Voss
; (
1990
)
Dünnschichttech-nologien ’90
; Bd. 2;
VDI-Verlag GmbH
;
367
379
3.
A. E.
Zaikin
,
A. V.
Levin
,
A. L.
Petrov
,
S. A.
Stranin
; (
1991
)
Sov. J. Quantum Eletron
.
21
(
6
),
643
644
4.
H. -U.
Krebs
,
O.
Bremert
; (
1993
)
Appl. Phys. Lett
.
62
(
19
);
2341
2342
5.
C. H.
Becker
,
J. B.
Pallix
; (
1988
)
J. Appl. Phys.
64
(
10
);
5152
5156
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