This paper describes current circumstances on applications of the excimer laser in Japan from the viewpoints of Tosei Electrobeam Co., Ltd. as a job shop who has the excimer laser system.

  1. 20 industrial excimer lasers are running to date, most of which are adopted to precise process of polymers.

  2. 40% of those samples processed in the job shop are made of metals and ceramics. Processing of these inorganic mmaterials potentially calls for the excimer laser system.

1.
YANO Survey Report
(
1990
),
YANO ECONOMIC REEARCH INSTITUTE
,
TOKYO
104
.
2.
LASER SHIMPO, NO.10
(
1990
):
17
.
3.
M.
Izumi
 et al,
Study of High Aspect Ratio Micro Drilling by Excimer Laser
(
1992
).
4.
LASER SHIMPO
, NO.28 (
1991
):
25
5.
LASER SHIMPO
, NO.31 (
1991
):
22
–
23
.
6.
T.
Kadoya
 et al,
Trends of Excimer Laser Processing in Japan
(
July
,
1992
).
Japan Laser Processing Society
28
:
191
–
201
.
Google Scholar
 
7.
S.
Yamaguchi
,
Excimer Laser Processing of Composite Materials for Aerospace Components
(
1992
).
LAMP ’
92
:
1117
–
1124
.
Google Scholar
 
This content is only available via PDF.
© 1993 Laser Institute of America.
1993
Laser Institute of America
You do not currently have access to this content.