In this paper experiments of micro machining of various metals with an excimer laser will be presented. Ablation rates and surface topography were determined under different gas atmospheres as function of different laser parameters (fluence, beam geometry, pulse number). The surface pressure, which develops during the ablation process and which mainly determines the ablation result, was detected by means of a piezoelectric pressure gauge. Furthermore, the influence of optical diffraction as consequence of mask projection was calculated and compared to the results. Deriving from these results, methods to improve the ablation structures were developed which will be presented and discussed, as well.

Topics
Piezoelectricity, Geodesy, Lasers, Micro-machining
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© 1992 Laser Institute of America.
1992
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