A new micro object detecting sensor using diffracted light wave was developed. A line-like micro-object on the order of tenth micrometers in diameter can be detected over a large operating range of 6.5mm wide 80mm long. The sensitivity of this sensor is not affected by the color, material or diameter of the object. Futhermore, the sensor is able to detect not only the existence of the object but also the lateral direction of the moving object when it gets out of the operating range.

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