An ultra-high precision laser scanning system having 25500 addressable points has been developed.

A precise optical subsystem including an optimized fθ lens has been developed that focuses an ultra violet (UV) laser beam to a small spot over a wide scanning area with minute position distortion. In addition, an electrical subsystem has been developed to correct residual scanning errors to meet scanning precision requirements. By integrating the optical and electrical subsystems, target scanning precision was achieved.

An experimental UV laser scanning system assembled on an optical bench provided ultra-high precision recording samples on UV sensitive materials. Recording samples met the desired scanning accuracy target of +20 μm over the entire 510 mm scanning width area.

This laser scanning technology can be applied to high precision instrumentation and measuring devices.

Topics
General procedures and instrumentation, Laser scanning
1.
John M.
Fleischer
 (
1973
).
Light Scanning and Printing System
. U. S. Patent 3750189.
Google Scholar
 
2.
J.P.
Donahue
 (
1979
).
Laser pattern generator for printed circuit board artwork generation
.
SPIE
. Vol.
200
:
179
–
186
.
Google Scholar
 
3.
F.
Bestenreiner
,
U.
Greis
,
J.
Helinberger
 and
K.
Stadler
 (
Spring
,
1976
).
Visiblity and corrections of periodic interference structures in line-by-line recorded images
.
J. Appl. Photo. Eng.
Vol.
2
:
86
–
92
.
Google Scholar
 
4.
W.
Meye
 (
1977
).
Optical character generation for a high-speed non-impact Printer
.
J. Photographic Science
. Vol.
25
.
https://doi.org/10.1080/00223638.1977.11737935
Google Scholar
 
5.
G.
Toyen
 (
1976
).
Generation of precision pixel clock in laser printers and scanners
.
SPIE
. Vol.
84
:
138
–
145
.
Google Scholar
 
6.
T.
Matsuda
,
T.
Mikami
 and
F.
Abe
 (
Feb.
,
1983
).
Correcting Method for Light Scanning Error of Rotating Polygonal Mirror(in Japanese)
. Trans. I.E.C.E. Japan.
J66-C
,
8
:
137
–
144
.
Google Scholar
 
7.
T.
Mikami
,
F.
Abe
 and
T.
matsuda
 (
Dec.
,
1982
).
A Correction Method for Laser Scanning Errors in High Speed Laser Printers
.
Fujitsu Sci. & Tech. J.
18
,
4
:
579
–
594
.
Google Scholar
 
8.
P.M.
Emmel
 (
1980
).
System design considerations for laser scanning
.
SPIE
. Vol.
222
:
2
–
14
.
Google Scholar
 
9.
F.
Abe
,
T.
Mikami
,
T.
Matsuda
 and
H.
Takahashi
 (
July
,
1979
).
High speed laser printer with high resolution
.
LASER79 Opto-electronics Conf. Proc.
(
Munich
):
374
–
378
.
Google Scholar
 
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© 1984 Laser Institute of America.
1984
Laser Institute of America
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