High resolution surface contouring using laser scanning Available to Purchase

Optical means of measuring the topography of surfaces has been in common use in optical fabrication for many decades. Recent demands for more flexible and high speed inspection techniques from semiconductor wafer fabrication and memory disc fabrication have necessitated the need for different approaches to this measurement problem. In this paper a new method of measuring specular and partially specular surfaces is described. This automated surface contouring system measures the slope of the surface at various points of the test aperture using a two dimensional laser scanner. The three dimensional representation of the test surface is then computed from the slope values measured across the test aperture.