Femtosecond laser micro-/nano-fabrication has been recognized as an enabling technology with unprecedented high precision and quality, which achieves the fabrication of various optoelectronic devices, including optofluidic devices for chemical and biomedical diagnostics with merits of versatile functionalities, compactness, high degree of integration, minimized waste, and low cost. Starting from the study on the fabrication of three-dimensional structures in dielectrics with the fundamental output of a femtosecond laser (wavelength at 800 nm, repetition rate of 1 kHz, and pulse energy up to 1 mJ), we report either a chemical etching-assisted femtosecond laser microfabrication technique or femtosecond laser induced multiphoton absorption technique to realize optofluidic devices. In this study, effects of fabrication parameters, such as laser energy, polarization of laser, and writing speed, have been investigated in order to identify optimal parameters for the realization of microstructures of different designs and specifications. Complex features have been designed and achieved to implement different functionalities. Fluidic movement in the optofluidic devices of different configurations, such as laminar flow and diffusion, has been explored for particle sorting. The applications of the femtosecond laser printed optofluidic devices and systems in sensing different environmental parameters, such as temperature, refractive index, pressure, and concentration, will be discussed, together with the revelation of different sensing mechanisms and the possibility of multiparameter sensing.
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ICALEO 2018: 37th International Congress on Applications of Lasers & Electro-Optics
October 14–18, 2018
Orlando, Florida, USA
ISBN:
978-1-940168-18-0
PROCEEDINGS PAPER
Femtosecond laser 3D printing of optofluidic devices and systems Available to Purchase
Qiying Chen;
Qiying Chen
Department of Physics and Physical Oceanography, Memorial University of Newfoundland
, St. John’s, NL A1B 3X7, Canada
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Daiying Zhang;
Daiying Zhang
Department of Physics and Physical Oceanography, Memorial University of Newfoundland
, St. John’s, NL A1B 3X7, Canada
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Xiaoxi Man;
Xiaoxi Man
Department of Physics and Physical Oceanography, Memorial University of Newfoundland
, St. John’s, NL A1B 3X7, Canada
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Liqiu Men
Liqiu Men
Department of Physics and Physical Oceanography, Memorial University of Newfoundland
, St. John’s, NL A1B 3X7, Canada
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Published Online:
October 01 2018
Citation
Qiying Chen, Daiying Zhang, Xiaoxi Man, Liqiu Men; October 14–18, 2018. "Femtosecond laser 3D printing of optofluidic devices and systems." Proceedings of the ICALEO 2018: 37th International Congress on Applications of Lasers & Electro-Optics. ICALEO 2018: 37th International Congress on Applications of Lasers & Electro-Optics. Orlando, Florida, USA. (pp. N202). ASME. https://doi.org/10.2351/7.0004093
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