Laser machining is required for material processing in deep ultra violet region where the wavelength is less than 300 nm. However it is hard to get high power solid-state lasers in this spectral region. In this study, we investigated process capabilities with ArF and KrF excimer lasers to explore its possibilities for micromachining on wide bandgap materials. These results were observed with three types of microscopies. We have successfully drilled 100 micron meter holes with aspect ratio of 5 into a typical tempered glass sheet without any significant defects. As the ablation rate was quite affordable, excimer lasers are expected to be put into practical use for mass production.

Topics
Solid state lasers, Machining, Materials synthesis and processing
1.
V.
Kuhn
,
T.
Gottwald
,
C.
Stolzenburg
,
S.
Schad
,
A.
Killi
 &
T.
Ryba
 (
2015
)
Latest advances in high brightness disk lasers
,
Proc. SPIE
9342
,
93420Y
.
Google Scholar
 
2.
M.
Nishioka
,
S.
Fukumoto
,
F.
Kawamura
,
M.
Yoshimura
,
Y.
Mori
 &
T.
Sasaki
 (
2003
)
Improvement of laser-induced damage tolerance in CsLiB6O10 for high-power UV laser source
,
Tech. Dig. CLEO CTuF2.
Google Scholar
 
3.
T.
Katsura
,
T.
Kojima
,
M.
Kurosawa
,
J.
Nishimae
,
M.
Sekiguchi
,
K.
Yasui
,
M.
Yoshimura
,
T.
Eiro
 &
T.
Sasaki
 (
2007
)
High-power, high-repetition UV beam generation with an all-solid-state laser
,
Tech. Dig. CLEO/Europe CA5.3
Google Scholar
 
4.
J.
Sakuma
,
K.
Deki
,
A.
Finch
,
Y.
Ohsako
 &
T.
Yokota
 (
2000
)
All-solid-state, high-power, deep-UV laser system based on cascaded sum-frequency mixing in CsLiB6O10 crystals
,
Appl. Opt.
39
,
5505
.
https://doi.org/10.1364/AO.39.005505
Google Scholar
Crossref
Search ADS
PubMed
 
5.
K.
Ishida
,
T.
Ohta
,
H.
Miyamoto
,
T.
Kumazaki
,
H.
Tsushima
,
A.
Kurosu
,
T.
Matsunaga
 &
H.
Mizoguchi
 (
2016
)
The ArF laser for the next generation multiple-patterning immersion lithography supporting green operations
,
Proc. SPIE
9780
,
9780
–
10
.
Google Scholar
 
6.
S.
Tanaka
,
M.
Arakawa
,
A.
Fuchimukai
,
Y.
Sasaki
,
T.
Onose
,
Y.
Kamba
,
H.
Igarashi
,
C.
Qu
,
M.
Tamiya
,
H.
Oizumi
,
S.
Ito
,
K.
Kakizaki
,
H.
Xuan
,
Z.
Zhao
,
Y.
Kobayashi
 &
H.
Mizoguchi
 (
2016
)
Development of high coherence high power 193 nm laser
,
Proc. SPIE
9726
,
66
.
Google Scholar
 
7.
J.
Ihlemann
 &
B.
Wolff-Rottke
 (
1996
)
Excimer laser micro machining of inorganic dielectrics
,
Applied Surface Science
106
,
282
.
https://doi.org/10.1016/S0169-4332(96)00422-9
Google Scholar
Crossref
Search ADS
 
This content is only available via PDF.
© 2017 Laser Institute of America.
2017
Laser Institute of America
You do not currently have access to this content.