A novel laser three-dimension micro processing technology, which is called Laser Ablation by Projective Galvanometer Scanning (LPAGS), has been introduced to fabricate microstructures on free-form surface with high efficiency and high precision firstly by Huazhong University of Science and Technology. The principle of LPAGS is as follows: (1)laser spot size, energy distribution remains basically constant in the range of laser focusing depth of focus(DOF), (2)the reversible property of light. In this paper, the main factor, laser beam orientation, that affects the processing quality is studied. The variation of laser beam orientation will lead to the change of laser spot and energy distribution. The ablation behavior of FTO, PI film irradiated by a 355nm DPSS Q-switched UV laser at different angles for incidence is modeled and experimentally verified.

Topics
Galvanometers, Ultraviolet lasers, Laser ablation
1.
Berend
Denkena
,
Jens
Kohler
. (
2013
)
Influence of 5-axes-kinematics Geometrical Accuracy in Riblet Manufacturing Processes
,
Proceedings of the 4th Machining Innovations Conference
,
Hannover, September
Google Scholar
Crossref
Search ADS
 
2.
Kuan-Hung
Chen
. (
2011
)
Investigation of tool orientation for milling blade of impeller in five-axis machining
,
Int. J. Adv. Manuf. Technol.
Google Scholar
 
3.
M.
Javad Barakchi
Fard Hsi-Yung
Feng.
 (
2009
)
Effect of tool tilt angle on machining strip width in five-axis flat-end milling of free-form surfaces
,
Int. J. Adv. Manuf. Technol.
Google Scholar
 
4.
Dong
Chen
,
Bin
Lin
,
Zhilin
Han
,
Yanbin
Zhang
. (
2013
)
Study on the optimization of cutting parameters in turning thin-walled circular cylindrical shell based upon cutting stability
.
International journal of advance manufacture technology
.
Google Scholar
 
5.
K.Abdel
Ghany
,
H.Abdel
Rafea
,
M.
Newishy
 (
2006
)
Using a Nd : YAG laser and six axes robot to cut zinc-coated steel
,
International Journal Of Advanced Manufacturing Technology
.
Google Scholar
 
6.
P.
Heyl
,
T.
Olschewski
,
R. W.
Wijnaendts
. (
2001
)
Manufacturing of 3D structures for micro-tools using laser ablation
,
Microelectronic Engineering
, (
57
–
58
):775–780
Google Scholar
 
7.
Huan
Yang
,
Dongchuan
Fu
,
Ming
Jiang
,
Jun
Duan
,
Fei
Zhang
,
Xiaoyan
Zeng
,
Udo
Bach
. (
2013
)
Ultraviolet laser ablation of fluorine-doped tin oxide thin films for dye-sensitized back-contact solar cells
, Thin Solid Films.
Google Scholar
 
8.
Wang
C
,
Zeng
X.
 (
2007
)
Study of laser carving three-dimensional structures on ceramics: quality controlling and mechanisms
.
Opt. Laser Technol.
39
:
1400
–
5
.
https://doi.org/10.1016/j.optlastec.2006.10.010
Google Scholar
Crossref
Search ADS
 
9.
Seung H.
Ko
, ect. (
2006
)
Nanosecond laser ablation of gold nanoparticle films
,
APPLIED PHYSICS LETTERS
89
,
141126
https://doi.org/10.1063/1.2360241
Google Scholar
Crossref
Search ADS
 
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