Laser based dry integration of rolled-up nanomembranes into polymer substrates

A strategy for the integration of rolled-up micro scaled sensor devices on polymer substrates using laser micromachining and laser welding was developed and investigated. Using inexpensive polycarbonate substrates, this strategy thereby focuses on the utilization of such sensor elements in low cost yet fully integrated point-of-care Lab-on-a-Chip systems. In contrast to a previously developed MEMS-based “wet” integration method using a large number of photolithography steps involving the usage of organic solvents [1], the here presented “dry” integration method needs first of all less processing steps. Furthermore it eliminates the direct contact of the inner tube walls with the utilized solvents during the previously developed integration process. This leads to the possibility of applying a broad range of bio-functionalization on the surface of the nanomembranes that would be destroyed by the “wet” integration method.