A cross type of carbon fiber reinforced plastic (CFRP) plate, which composed of a carbon fiber and an epoxy resin, was put on the X-Y stage in the processing chamber. Ar gas was filled at 0.1 MPa in the chamber after exhaust at 1Pa. In this condition, the laser was irradiated the CFRP passing the attenuator for adjusting the laser intensity. After laser irradiation, the matrix evaporated zone (MEZ) was investigated with a confocal laser microscope. In Ar gas ambience, the MEZ was occurred few delamination area from 1.0 × 108 to 1.0 × 1010 W/cm2 of the laser fluence. The results revealed that the laser cutting of the CFRP in Ar gas ambience might be a useful method to suppression of the oxidization of the carbon fiber.

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