We report on new industrial process developments and applications using an ultrashort pulse laser system with a mean power of 15 Watt and the ability to produce femtosecond to picosecond laser pulses with high pulse energies at 1030nm, 515 nm, 343 nm and 247 nm in a single compact unit. Precise and reproducible structuring of thin-film (CI(G)S, CdTe) solar cells on plastic and glass substrates, scratching and isolating of ceramic substrates covered with a thin silicone film for LED manufacturing and micro-machining of metals, thin glass, ceramics and (bio)polymers for medical applications (e.g. stents) are discussed in detail. Additionally diffractive and refractive beam shaping optics were used for parallel beam processing applications and precise drilling, cutting and structuring of thin electronic films and materials. The results were analyzed (optical and confocal microscopy, SEM) and compared with Q-switched solid-state and fiber laser systems regarding thermal influence zones and machining quality. It was found that by optimizing the laser parameters of the ultrashort pulse laser system and using specially designed optical elements new and extremely precise industrial manufacturing processes with minimal thermal damage were possible compared to the longer pulsed laser systems currently used in micro and nano machining applications.

1.
Bengtson
,
M.
et al (
2013
)
Picosecond lasers come of age for micromachining
,
Industrial Laser Solutions for Manufacturing
, May/June,
15
19
2.
Raciukaitis
,
G.
et al (
2006
)
High repetition rate ps- and fs-DPSS lasers for micromachining
,
ICALEO 2006
,
Scottsdale, USA
3.
Grishin
,
M.
et al (
2008
)
Short-pulse lasers with the high power and repetition rate for microfabrication
,
ICALEO 2008
,
Temecula, USA
4.
Steiger
,
E.
(
2013
)
PHAROS: Industrietaugliche UKP-Laserstrahlquelle für die Mikro-Materialbearbeitung
,
LASER MAGAZIN
2
,
20
21
5.
Steiger
,
E.
(
2011
)
Ultrashort pulse lasers – a versatile industrial tool for new micromachining applications
,
ICALEO 2011
,
Orlando, USA
6.
Peters
,
R.
,
Oldorf
,
P.
(
2012
)
Novel applications of ultra-short pulsed lasers
,
Optik+Photonik
4
,
30
33
7.
Moorhouse
,
C.
(
2012
)
Picosecond laser processing of high-tech devices
,
Industrial Laser Solutions for Manufacturing
, Nov./Dec.,
21
23
8.
Fornardi
,
Ch
. (
2013
)
Laser-beam helical drilling of high quality micro holes
,
Applicazioni Laser
41
,
30
35
9.
Pause
,
S.
,
Hebel
,
R.
(
2013
)
Laserschneiden mit Ultrakurzpulslasern
,
Mikroproduktion
03
,
26
30
10.
Haupt
,
O.
,
Gäbler
,
F.
(
2013
)
Short-pulse Q-switched lasers enhance precision marking applications
,
Photonics Spectra
, June,
45
47
11.
Raciukaitis
,
G.
et al (
2008
)
Laser structuring of conductive films on transparent substrates for electronics devices
,
ICALEO 2008
,
Temecula, USA
12.
Chichkov
,
B. N.
et al (
1996
)
Femtosecond, picosecond and nanosecond laser ablation of solids
,
Appl. Phys.
A63
,
109
115
13.
Steiger
,
E.
et al (
2009
)
Optimization of the structuring processes of CI(G)S thin-film solar cells with an ultrafast picosecond laser and a special beam shaping optics
,
ICALEO 2009
,
Orlando, USA
14.
Gecys
,
P.
et al (
2011
)
Scribing of thin-film solar cells with picosecond laser pulses
,
Physics Procedia
12
,
141
148
15.
Gebhardt
,
M.
et al (
2013
)
Laser structuring of flexible organic solar cells
,
Laser Technik Journal
1
,
25
28
16.
Gebhardt
,
M.
et al (
2012
)
Ultrakurzpulslaser für medizinische Anwendungen
,
Mikroproduktion
1
,
20
25
17.
Bronde
,
S.
,
Ogura
,
G.
(
2012
)
Laser micro-cutting of polymer-based life-science devices
,
Industrial Laser Solutions for Manufacturing
, March/April,
4
6
18.
Umhofer
,
U.
et al (
2011
)
Refractive and diffractive laser beam shaping
,
Laser Journal
3
,
24
27
19.
Laskin
,
A.
(
2013
)
Solutions for beam shaping
,
Laser Technik Journal
1
,
37
40
20.
Patel
,
R. S.
,
Tamhankar
,
A.
(
2010
)
Beam profile effect for thin film solar cell scribing
,
Industrial Laser Solutions for Manufacturing
, Nov./Dec.,
21
25
This content is only available via PDF.
You do not currently have access to this content.