New micro and nano laser machining applications with a versatile ultrashort pulse laser system and diffractive optical elements

We report on new industrial process developments and applications using an ultrashort pulse laser system with a mean power of 15 Watt and the ability to produce femtosecond to picosecond laser pulses with high pulse energies at 1030nm, 515 nm, 343 nm and 247 nm in a single compact unit. Precise and reproducible structuring of thin-film (CI(G)S, CdTe) solar cells on plastic and glass substrates, scratching and isolating of ceramic substrates covered with a thin silicone film for LED manufacturing and micro-machining of metals, thin glass, ceramics and (bio)polymers for medical applications (e.g. stents) are discussed in detail. Additionally diffractive and refractive beam shaping optics were used for parallel beam processing applications and precise drilling, cutting and structuring of thin electronic films and materials. The results were analyzed (optical and confocal microscopy, SEM) and compared with Q-switched solid-state and fiber laser systems regarding thermal influence zones and machining quality. It was found that by optimizing the laser parameters of the ultrashort pulse laser system and using specially designed optical elements new and extremely precise industrial manufacturing processes with minimal thermal damage were possible compared to the longer pulsed laser systems currently used in micro and nano machining applications.