We fabricated a novel photodetector by subjecting a Si crystal having a p–n homojunction to phonon-assisted annealing. The photosensitivity of this device for incident light having a wavelength of 1.16 μm or greater was about three-times higher than that of a reference Si-PIN photodiode. The photosensitivity for incident light with a wavelength of around 1.32 μm was increased by applying a forward current. When the forward current density was 10 A/cm2, the device showed photosensitivities of 3.1 A/W at a wavelength of 1.14 μm and 0.10 A/W at 1.32 μm. The photosensitivity at 1.32 μm is at least 4000-times higher than the zero-bias photosensitivity. This remarkable increase was due to the manifestation of optical amplification cause by the forward current injection. For a forward current density of 9 A/cm2, the small-signal gain coefficient of the optical amplification was 2.2 × 10−2, and the saturation power was 7.1 × 102 mW.
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ICALEO 2012: 31st International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing
September 23–27, 2012
Anaheim, California, USA
ISBN:
978-0-912035-96-3
PROCEEDINGS PAPER
1.3μm-Band Si photodetectors with optical gains fabricated by dressed photon assisted annealing Available to Purchase
Hajime Tanaka;
Hajime Tanaka
1
Department of Electrical Engineering and Information Systems, Graduate School of Engineering, The University of Tokyo
, 2-11-16 Yayoi, Bunkyo-ku, Tokyo 113-8656, Japan
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Tadashi Kawazoe;
Tadashi Kawazoe
1
Department of Electrical Engineering and Information Systems, Graduate School of Engineering, The University of Tokyo
, 2-11-16 Yayoi, Bunkyo-ku, Tokyo 113-8656, Japan
2
Nanophotonics Research Center, Graduate School of Engineering, The University of Tokyo,2-11-16 Yayoi
, Bunkyo-ku, Tokyo 113-8656, Japan
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Motoichi Ohtsu
Motoichi Ohtsu
1
Department of Electrical Engineering and Information Systems, Graduate School of Engineering, The University of Tokyo
, 2-11-16 Yayoi, Bunkyo-ku, Tokyo 113-8656, Japan
2
Nanophotonics Research Center, Graduate School of Engineering, The University of Tokyo,2-11-16 Yayoi
, Bunkyo-ku, Tokyo 113-8656, Japan
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Published Online:
September 01 2012
Citation
Hajime Tanaka, Tadashi Kawazoe, Motoichi Ohtsu; September 23–27, 2012. "1.3μm-Band Si photodetectors with optical gains fabricated by dressed photon assisted annealing." Proceedings of the ICALEO 2012: 31st International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing. ICALEO 2012: 31st International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing. Anaheim, California, USA. (pp. pp. 991-998). ASME. https://doi.org/10.2351/1.5062575
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