Ultra short laser pulses in the ps or fs regime are used, when high requirements concerning machining quality are demanded. However, beside the quality also the process efficiency denotes a key factor for the successful transfer of this technology into real industrial applications and the process efficiency is mainly influenced by the removal rate. In this work the results of a study about the influence of the pulse duration onto the removal rate for pulses from 10 ps down to 250 fs will be presented. The investigated materials were copper, stainless steel, silicon, germanium, zirconium oxide (ZrO2), polycrystalline diamond (PCD) fused silica and soda lime glass. An increase of the removal rate with shorter pulse durations was observed for all materials except the two glasses. A very special behaviour with a sharp change between two regimes with different ablation processes was observed for soda lime glasses for both wavelengths.
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