Using ps laser pulses with high pulse repetition rates, novel fusion welding technique of Si/glass material combination has been developed, which can overcome the most problems encountered in existing anodic bonding, providing excellent joint strength and throughput. Our technique allows welding of Si/glass without pre-and post-heating at high spatial resolution down to 10µm at maximum joint strength of 80MPa, and is shown to provide much better performance than ns laser pulses based on the analysis of laser-matter interaction. No defects are found by cutting using standard blade dicer and accelerated life test (500 cycles: -40˚C∼85˚C) of the laser-welded joint, demonstrating the welding technique has excellent performance for applications to wafer-level packaging and hermetic sealing.
Skip Nav Destination
ICALEO 2012: 31st International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing
September 23–27, 2012
Anaheim, California, USA
ISBN:
978-0-912035-96-3
PROCEEDINGS PAPER
Novel fusion welding technology of Si/glass using ultrashort laser pulses with high pulse repetition rates
Isamu Miyamoto;
Isamu Miyamoto
1
Osaka University
, 2-1 Yamada-Oka, Suita, Osaka 565-0871, Japan
2
Erlangen Graduate School of Advanced Optical Technologies (SAOT)
, Paul-Gordon Str. 6, 91052, Germany
Search for other works by this author on:
Yasuhiro Okamoto;
Yasuhiro Okamoto
3
Okayama University
, 3-1-1, Tsushimanaka, Okayama 700-8530, Japan
Search for other works by this author on:
Assi Hansen;
Assi Hansen
4
Tampere University of Technology
, P.O.Box 589, FI-33101, Tampere, Finland
Search for other works by this author on:
Tiina Amberla;
Tiina Amberla
5
Corelase Ltd.
, P.O.Box 73, FI-33721, Tampere, Finland
Search for other works by this author on:
Jorma Vihinen;
Jorma Vihinen
4
Tampere University of Technology
, P.O.Box 589, FI-33101, Tampere, Finland
Search for other works by this author on:
Jarno Kangastupa
Jarno Kangastupa
5
Corelase Ltd.
, P.O.Box 73, FI-33721, Tampere, Finland
Search for other works by this author on:
Published Online:
September 01 2012
Citation
Isamu Miyamoto, Yasuhiro Okamoto, Assi Hansen, Tiina Amberla, Jorma Vihinen, Jarno Kangastupa; September 23–27, 2012. "Novel fusion welding technology of Si/glass using ultrashort laser pulses with high pulse repetition rates." Proceedings of the ICALEO 2012: 31st International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing. ICALEO 2012: 31st International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing. Anaheim, California, USA. (pp. pp. 784-793). ASME. https://doi.org/10.2351/1.5062541
Download citation file:
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.