In recent years, femtosecond laser pulses have been used for micromachining, which cleanly ablate a variety of materials with high precision for a wide range of applications, such as making fine features on metal surfaces, repairing patterns for Flat Panel Device (FPD), removing residues on micro-devices, etc. However, recent research has shown that distortions of the femtosecond pulses used for machining adversely affect micromachining performance. In order to obtain the best resolution and the highest performance in the micromachining process, we optimize femtosecond laser pulses on a sample, using pulse characterization and a four prism pulse compressor. By adjusting the distance between two prisms and the angle of the last prism we can control the temporal chirp and the pulse front tilt continuously.
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ICALEO 2012: 31st International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing
September 23–27, 2012
Anaheim, California, USA
ISBN:
978-0-912035-96-3
PROCEEDINGS PAPER
Optimizing ultrashort laser pulses for high-precision and high-performance micromachining process Available to Purchase
Hoon Jeong;
Hoon Jeong
1
Manufacturing System Center, Korea Institute of Industrial Technology (KITECH) 35-3
, Hongcheon, Ipjang, Cheonan, South Korea
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Dongjoo Lee
Dongjoo Lee
1
Manufacturing System Center, Korea Institute of Industrial Technology (KITECH) 35-3
, Hongcheon, Ipjang, Cheonan, South Korea
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Published Online:
September 01 2012
Citation
Hoon Jeong, Dongjoo Lee; September 23–27, 2012. "Optimizing ultrashort laser pulses for high-precision and high-performance micromachining process." Proceedings of the ICALEO 2012: 31st International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing. ICALEO 2012: 31st International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing. Anaheim, California, USA. (pp. pp. 1294-1296). ASME. https://doi.org/10.2351/1.5062425
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