The imaging resolution of a conventional optical microscope is limited by diffraction to about half of the illuminating wavelength. A micro/submicron particle induced near-field effect can focus an incident laser beam to a small region of tens of nanometres. Using self-assembled transparent microspheres as far-field superlenses (FSLs), here we report the first experimental demonstration of combined structural, thermal, and stress imaging at a 20 nm resolution (<λ/26, λ=532 nm), even though the laser beam is at μm size. FSLs are integrated into a confocal Raman spectrometer and microscope system to overcome the diffraction limit. Periodical surface structure, thermal and stress information is examined. Furthermore, electromagnetic simulation is conducted to well interpret the experimental results. FSLs provide new opportunities in nanoscale imaging, nanolithography and nanotexturing.
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ICALEO 2012: 31st International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing
September 23–27, 2012
Anaheim, California, USA
ISBN:
978-0-912035-96-3
PROCEEDINGS PAPER
Far-field nanoscale thermal and structure imaging
Xiaoduan Tang;
Xiaoduan Tang
1
Department of Mechanical Engineering, Iowa State University
, Ames, Iowa, 50011, USA
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Shen Xu;
Shen Xu
1
Department of Mechanical Engineering, Iowa State University
, Ames, Iowa, 50011, USA
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Xinwei Wang
Xinwei Wang
1
Department of Mechanical Engineering, Iowa State University
, Ames, Iowa, 50011, USA
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Published Online:
September 01 2012
Citation
Xiaoduan Tang, Shen Xu, Xinwei Wang; September 23–27, 2012. "Far-field nanoscale thermal and structure imaging." Proceedings of the ICALEO 2012: 31st International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing. ICALEO 2012: 31st International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing. Anaheim, California, USA. (pp. pp. 1123-1129). ASME. https://doi.org/10.2351/1.5062395
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