The simple theoretical model of laser plasma heating side walls in laser drilling high aspect ratio microvias in metals and semiconductors is proposed. On this basis the recommendations are given how to avoid the undesirable effect of laser plasma melting side walls, strongly deteriorating microdrilling quality. Obtained results constitute a physical foundation for development of optimized laser drilling and cutting. Particular estimations are given for laser drilling silicon wafers.
REFERENCES
1.
Kononenko
, T.
, Konov
, V.
, Garnov
, S.
, Danielius
, R.
, Piskarskas
, A.
, Tamoshauskas
, G.
& Dausinger
, F.
(1999
) Comparative study of the ablation of materials by femtosecond and pico- or nanosecond laser pulses
, Quantum Electronics
29
, 724
–728
.2.
Chang
, J.
, Warner
, B.
, Dragon
, E.
& Martinez
, M.
(1998
) Precision micromachining with pulsed green lasers
, J. Laser Applications
10
, 285
–29
.3.
Paul
, S.
, Kudryashov
, S.I.
, Lyon
, K.
, & Allen
, S.D.
(2007
) Nanosecond-laser plasma-assisted ultradeep microdrilling of optically opaque and transparent solids
, J. Appl. Phys.
101
, 043106
–113
.4.
Garnov
, S.V.
, Klimentov
, S.M.
, Konov
, V.I.
, Kononenko
, T.V.
& Dausinger
, F.
(1998
) Characteristics of plasma screening in ablation shaping of deep channels by high-intensity laser radiation
, Quantum Electron.
28
, 42
–45
.5.
Karnakis
, D.M.
, Rutterford
, G.
& Knowles
, M.R.H.
(2005
) High power DPSS laser micromachining of silicon and stainless steel
, in Proc. 3rd Int. WLT-Conf. Lasers in Manufacturing
, Munich
.6.
Luft
, A.
, Franz
, U.
, Emsermann
, A.
& Kaspar
, J.
(1996
) A study of thermal and mechanical effects on materials induced by pulsed laser drilling
, Appl. Phys. A
63
, 93
–105
.7.
Tokarev
, V.N.
, Lopez
, J.
, Lazare
, S.
& Weisbuch
, F.
(2002
) High-aspect-ratio microdrilling of polymers with UV laser ablation: Experiment and analytical model
, Appl. Phys. A
76
, 385
–396
.8.
Kraus
, M.
, Collmer
, S.
, Sommer
, S.
& Dausinger
, F.
(2008
) Microdrilling in steel with frequency-doubled ultrashort pulsed laser radiation
, Journal of Laser Micro/Nanoengineering
3
, 129
–134
.9.
Tokarev
, V.N.
& Kaplan
, A.F.H.
(1999
) An analytical modeling of time-dependent pulsed laser melting
, J. Appl. Phys.
86
, 2836
–2846
.10.
Tokarev
, V.N.
, Shmakov
, V.A.
, Yamschikov
, V.A.
et al To be published.11.
Preuss
, S.
, Demchuk
A.
& Stuke
, M.
(1995
) Sub-picosecond UV laser ablation of metals
, Appl. Phys. A
61
, 33
–37
.12.
Basiev
, T.T.
, Garnov
, S.V.
, Klimentov
, S.M.
et al (2007
) High-speed ablation of ultradeep channels by a phase-conjugate dynamically controlled passively Q-switched Nd:YAG laser
, Quant. Electron.
37
, 956
–960
.13.
Klimentov
, S.M.
, Pivovarov
, P.A.
, Konov
, V.I.
et al. (2008
) Generation of long-living charged nanoparticles at ablation in air and their role in pulsed microdrilling
, Laser Physics
18
, 774
–779
.14.
Bado
, P.
, Clark
, W.
& Said
, A.
(2007
) Introduction to Micromachining, Version 2.3, Clark-MXR
.15.
Bergman
, H.W.
(1996
) Excimer laser-induced surface modifications and matter interaction using double-pulse-technique
, Appl.Surf.Sci.
96-98
, 287
–295
.16.
Forsman
, A.
, Banks
, P.
, Perry
, M.
et al. (2005
) Double-pulse machining as a technique for the enhancement of material removal rates in laser machining of metals
, J. Appl. Phys.
98
, 1
–6
.17.
Basiev
, T.T.
, Fedin
, A.V.
, Gavrilov
, A.V.
et al. (1998
) Small diameter deep hole drilling by single-mode Nd:YAG laser with scanning passive Q-switch
, in Proc. Int. Conf. on Lasers’98
, V.J.
Corcoran
and T.A.
Goldman
(ed), STS Press
, 1060
–1067
.18.
Tan
, B.
(2006
) Deep microhole drilling in a silicon substrate using multi-bursts of nanosecond UV laser pulses
, J. Micromech. Microeng.
16
, 109
–112
.19.
Chuang
, T.J.
, Hiraoka
, H.
& Mödl
, A.
(1988
) Laser-photoetching characteristics of polymers with dopants
, Appl. Phys. A
45
, 277
–288
.20.
Tokarev
, V.N.
& Kaplan
, A.F.H.
(1999
) Suppression of melt flows in pulse laser ablation: Application to the clean laser processing
, J. Phys. D: Appl. Phys.
32
, 1526
–1538
.21.
Li
, L.
& Achara
, C.
(2004
) Chemical assisted laser machining for the minimisation of recast and heat affected zone
, CIRP Annals-Manufacturing Technology
53
, 175
–178
.22.
Kuzmichev
, A.V.
, Ageev
, V.P.
& Konov
, V.I.
(1992
) Silicon etching stimulated by KrF laser radiation in atmosphere of Cl-containing gases
, Bull. Russ. Academy of Sci., Phys. Series
56
, 110
–116
[in Russian].23.
Her
, T.-H.
, Finlay
, R. J.
, Wu
, C.
, Deliwala
, S.
& Mazur
, E.
(1998
) Microstructuring of silicon with femtosecond laser pulses
, Appl. Phys. Lett.
73
, 1673
–1675
.24.
Lazare
, S.
, Tokarev
, V.N.
, Sionkowska
, A.
et al., (2005
) Surface foaming of collagen, chitosan and other biopolymer films by KrF excimer laser ablation
, Appl. Phys. A
81
, 465
–470
.25.
Leong
, K.H.
, Xu
, Z.
& Reed
, C.B.
(2003
) Laser drilling of rocks
, Industrial Laser Solutions for Manufacturing
, March 2003
.26.
Dausinger
, F.
(2000
) Drilling of high-quality microholes
, in Proc. ICALEO, Section B
, USA
, 1
–10
.27.
Leong
, K.H.
Evolving laser processing
, http://www.industrial-lasers.com/display_article/196902/39/none/none/Feat/Evolving-laser-processing28.
Klimentov
, S.M.
, Kononenko
, T.V.
, Pivovarov
, P.A.
et al. (2002
) Effect of nonlinear light scattering in air on ablation of materials produced by femtosecond laser pulses
, Quantum Electron.
32
, 433
–436
.
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