In this paper, it has been developed a model describing UV laser microhole drilling process, which can predict the drilled microhole profiles for several kinds of specific incident beams. The report tries to answer how the peak fluence, the beam diameter, and the material parameters affect the hole shapes.
The model also explains why hole drilling will stop under certain circumstances, i.e., under certain circumstance, more shots applied to the process will not generate any further drilling effect--a stabilized or saturated drilling happens. High efficient laser processing can be predicted from the model, i.e. what are the best parameters for certain processed materials. In this paper, a critical fluence or parameters are proposed to describe the minimum requirement for effective drilling and cutting. This model is suitable for most well defined UV beams and organic materials while it is not suitable for metal materials.
This report mainly concentrate on the comparison of the modeling and experimental data.