The growth of semiconductor ZnO nanowires in a periodic fashion is of great interest for many applications such as solar cells, field emission devices, light emitting diodes, and piezo-nanogenerators. Novel laser interference lithography techniques for the site-selective growth of ZnO nanowires on Gallium Nitride (GaN) substrate are described. A nanosecond pulsed Nd:YAG laser with 266nm wavelength is used in the experiments. Both laser interference ablation of GaN substrates and laser interference lithography of photoresist masks on GaN substrates are conducted to control the position and periodicity of grown individual ZnO nanowires. Simulations of both processes are presented. The nanowires, grown using a low temperature hydrothermal decomposition method on both types of substrates, follow the designed pattern, with a high degree of control in size, dimensionality, and uniformity. Well patterned and aligned individual ZnO nanowires on areas spanning one square-centimeter scale and onesquare-decimeter scale can be achieved by laser interference ablation and lithography respectively.
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ICALEO 2010: 29th International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing
September 26–30, 2010
Anaheim, California, USA
ISBN:
978-0-912035-61-1
PROCEEDINGS PAPER
Large area laser interference patterning for periodic growth of individual ZnO nanowires Available to Purchase
Dajun Yuan;
Dajun Yuan
1
Woodruff School of Mechanical Engineering, Georgia Institute of Technology
, Atlanta, GA 30332, USA
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Rui Guo;
Rui Guo
1
Woodruff School of Mechanical Engineering, Georgia Institute of Technology
, Atlanta, GA 30332, USA
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Yaguang Wei;
Yaguang Wei
2
School of Materials Science and Engineering, Georgia Institute of Technology
, Atlanta, GA 30332, USA
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Wenzhuo Wu;
Wenzhuo Wu
2
School of Materials Science and Engineering, Georgia Institute of Technology
, Atlanta, GA 30332, USA
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Zhonglin Wang;
Zhonglin Wang
2
School of Materials Science and Engineering, Georgia Institute of Technology
, Atlanta, GA 30332, USA
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Suman Das
Suman Das
1
Woodruff School of Mechanical Engineering, Georgia Institute of Technology
, Atlanta, GA 30332, USA
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Published Online:
September 01 2010
Citation
Dajun Yuan, Rui Guo, Yaguang Wei, Wenzhuo Wu, Zhonglin Wang, Suman Das; September 26–30, 2010. "Large area laser interference patterning for periodic growth of individual ZnO nanowires." Proceedings of the ICALEO 2010: 29th International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing. ICALEO 2010: 29th International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing. Anaheim, California, USA. (pp. pp. 1296-1302). ASME. https://doi.org/10.2351/1.5061974
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