In this paper, we report on our efforts on setting up and building an EUV-pump-probe microscope. The goal is the observation of femtosecond laser induced nanostructure formation with a spatial resolution of less than 100nm and a temporal resolution of less than 1ns. As exemplary structures, we use nanojets on thin gold films and periodic surface structures (ripples) on dielectrics, but in the future, the EUV-pump-probe microscope can become a versatile tool to observe physical or biological processes with high resolution in space and time.

1.
J.
Koch
,
F.
Korte
,
C.
Fallnich
,
A.
Ostendorf
,
B.
Chichkov
,“
Direct-write subwavelength structuring with femtosecond laser pulses
”,
Opt. Eng.
44
(
5
),
051103
(
2005
)
2.
D.
Wortmann
,
J.
Gottmann
, “
Fs-laser structuring of ridge waveguides
”,
Appl.Phys. A
93
,
197
201
(
2008
)
3.
F.
Korte
,
J.
Koch
, and
B. N.
Chichkov
,
Appl. Phys. A
79
,
879
(
2004
)
4.
Y.
Nakata
,
N.
Miyanaga
,
T.
Okada
,
Appl. Surf. Sci
.
253
,
6555
(
2007
)
5.
Y.P.
Meshcheryakov
and
N.M.
Bulgakova
,
Appl. Phys. A
82
,
363
(
2005
)
6.
D.S.
Ivanov
and
L.V.
Zhigilei
,
Phys. Rev. B
68
,
064114
(
2003
).
7.
D.S.
Ivanov
,
B.
Rethfeld
,
G.M.
O’Connor
,
T.J.
Glynn
,
A.N.
Volkov
,
L.V.
Zhigilei
,
Appl. Phys. A
92
,
791
(
2008
)
8.
R.
Wagner
,
J.
Gottmann
,
A.
Horn
,
E.W.
Kreutz
,
Appl. Surf. Sci
.
252
(
2006
)
8576
8579
9.
O.
Varlamova
,
F.
Costache
,
J.
Reif
,
M.
Bestehorn
,
Appl. Surf. Sci
.
252
(
2006
)
4702
10.
R.
Wagner
,
J.
Gottmann
,
A.
Horn
,
E.W.
Kreutz
,
Laser Precision Microfabrication 2003, Nagaya
,
Proc. SPIE
, vol.
5662
(
2004
)
168
11.
L.
Juschkin
,
R.
Freiberger
.
Proceedings of SPIE
,
7360
, pages 736005,1--8,
Bellingham, Wash
, (
2009
)
12.
I.
Mingareev
,
A.
Horn
,
Appl. Phys. A
,
92
,
917
920
, (
2008
)
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