In this paper, we report on our efforts on setting up and building an EUV-pump-probe microscope. The goal is the observation of femtosecond laser induced nanostructure formation with a spatial resolution of less than 100nm and a temporal resolution of less than 1ns. As exemplary structures, we use nanojets on thin gold films and periodic surface structures (ripples) on dielectrics, but in the future, the EUV-pump-probe microscope can become a versatile tool to observe physical or biological processes with high resolution in space and time.
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