An aero space material, Inconel 718, was laser drilled with a diode pumped solid state Nd:YAG laser. During the laser drilling process, the emission spectra of the Inconel 718 plasma have been recorded and analyzed using the optical emission spectroscopic method. After the process, the drilling depth of the holes produced under different process conditions was measured by an optical microscope. Temporal histories of the emission line intensity and drilling depth were obtained. An attempt to get the correlation between the line intensity and drilling depth was made. The electron temperature of the plasma and the electron number density were also determined to further understand the process.
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