In this literature review conventional methods and techniques for microscale processing are introduced and compared to laser micromachining. Conventional techniques studied include wet bulk etching, many dry etching techniques, LIGA processes, abrasive jet machining, electrical discharge machining, and mechanical micro-machining.
During the last decade the tangible advantages of laser material processing have sparked much interest and scientific study. These studies show that, given correct parameters, laser can be used to fabricate very small features and, as such, can be utilized in microscale processing. Especially, excimer and fiber lasers are seen as potential candidates, former being the more costly but also more well-known – and arguably more capable – choice. Other lasers included are Nd:YAG, Nd:YVO4, and Ti:sapphire solid-state lasers.
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