This paper presents the growth of multi-walled (MW) and single-walled (SW) carbon nanotubes (CNTs) by laser-induced chemical vapor deposition (LCVD) on a transparent substrate at room temperature. For the CNT growth, multiple catalyst layers (Fe/Al/Cr) are irradiated from the backside through the transparent substrate with a Nd:YVO4 laser (λ=532 nm). It is demonstrated that the fabrication of array of CNT patterns can be achieved with a single irradiation for each pattern using LCVD. By controlling the catalyst thickness and precursor gases (acetylene: C2H2 or ethylene: C2H4), SWCNTs and MWCNTs patterns are produced without preprocessing. The rapid growth of vertically aligned MWCNTs with a high rate of 1 µm/s is achieved. The SWCNT patterns with relatively high density are produced.

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