This paper presents the growth of multi-walled (MW) and single-walled (SW) carbon nanotubes (CNTs) by laser-induced chemical vapor deposition (LCVD) on a transparent substrate at room temperature. For the CNT growth, multiple catalyst layers (Fe/Al/Cr) are irradiated from the backside through the transparent substrate with a Nd:YVO4 laser (λ=532 nm). It is demonstrated that the fabrication of array of CNT patterns can be achieved with a single irradiation for each pattern using LCVD. By controlling the catalyst thickness and precursor gases (acetylene: C2H2 or ethylene: C2H4), SWCNTs and MWCNTs patterns are produced without preprocessing. The rapid growth of vertically aligned MWCNTs with a high rate of 1 µm/s is achieved. The SWCNT patterns with relatively high density are produced.
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ICALEO 2009: 28th International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing
November 2–5, 2009
Orlando, Florida, USA
ISBN:
978-0-912035-59-8
PROCEEDINGS PAPER
Rapid growth of carbon nanotubes using laser-induced chemical vapor deposition Available to Purchase
J. B. Park;
J. B. Park
1
Department of Mechatronics, Gwangju Institute of Science and Technology
1 Oryong-dong, Buk-gu, Gwangju 500-712, Republic of Korea
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M. S. Jeong;
M. S. Jeong
2
Advanced Photonics Research Institute, Gwangju Institute of Science and Technology
1 Oryong-dong, Buk-gu, Gwangju 500-712, Republic of Korea
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S. H. Jeong
S. H. Jeong
1
Department of Mechatronics, Gwangju Institute of Science and Technology
1 Oryong-dong, Buk-gu, Gwangju 500-712, Republic of Korea
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Published Online:
November 01 2009
Citation
J. B. Park, M. S. Jeong, S. H. Jeong; November 2–5, 2009. "Rapid growth of carbon nanotubes using laser-induced chemical vapor deposition." Proceedings of the ICALEO 2009: 28th International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing. ICALEO 2009: 28th International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing. Orlando, Florida, USA. (pp. pp. 1367-1370). ASME. https://doi.org/10.2351/1.5061500
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