Micro shockwave adjustment is a process mechanism which can be used for highly precise actuator adjustment with bending angle accuracies exceeding 0.1 µrad in different materials. The specific interaction between focussed ultrashort laser pulse and irradiated material allows inducing this process mechanism by ablation with high pulse energy. Within this paper, an analysis based on models of ultrashort laser pulse-material interaction is presented and compared to experimental results. Actuators based on capacitive distance sensing are used to discuss the long-term stability of this process mechanism. Furthermore virtually free-form mirrors fabricated by micro shockwave bending are presented as another possible application of this process mechanism besides micro adjustment.
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