An amplified Ti:Sapphire femtosecond laser source with 200 fs pulses was used to create micro-patterns on both polycrystalline and single crystal diamond films. These micro-pattern structures can be used for a variety of purposes including micro-fluidics, optoelectronics, and electron emitters. For very high aspect ratio features, an acetate replication system was used to display the approximate dimensions of the features created at the diamond surface.
REFERENCES
1.
Zoubir
, A.
, Shah
, L.
, Richardson
, K.
, Richardson
, M.
(2003
) Practical uses of femtosecond laser micro-materials processing
, Appl. Phys. A
77
, 311
–315
.2.
Joglekar
, A.P.
, Liu
, H.
, Meyhofer
, E.
, Mourou
, G.
, & Hunt
, A.J.
(2004
) Optics at critical intensity: Applications to nanomorphing
, Proc. Natl. Acad. Sci. USA
101
, 5856
–5861
.3.
Joglekar
, A.P.
, Liu
, H.
, Spooner
, G.J.
, Meyhofer
, E.
, Morou
, G.
&, Hunt
, A.J.
(2003
) A study of the deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining
, Appl. Phys.
77
, 25
–30
.4.
Gamaly
, E.G.
, Rode
, A.V.
, Tikhonchuk
, V.T.
, & Luther-Davies
, B.
(2002
) Ablation of solids by femtosecond lasers: Ablation mechanism and ablation thresholds for metals and dielectrics
, Physics of Plasmas
9
, 949
–957
.5.
Blombergen
, N.
, (1974
) Laser-induced optical breakdown in solids
, IEEE J. Quant. Elect.
10
, 375
–386
.6.
Korte
, F.F.
, Adams
, S.
, Egbert
, A.
, Fallnich
, C.
, Ostendorf
, A.
, Nolte
, S.
, Will
, M.
, Ruske
, J.P.
, Chichkov
, B.
, & Tuennermann
, A.
(2000
) Sub-diffraction limited structuring of solid targets with femtosecond laser pulses
, Opt. Express
7
, 41
–49
.7.
Campbell
, S.
, Dear
, F.C.
, Hand
, D.P.
, & Reit
, D.T.
, (2005
) Single-pulse femtosecond laser machining of glass
, J. Opt. A: Pure Appl. Opt.
7
, 162
–168
.8.
Gattass
, R.R.
, Cerami
, L.R.
, & Mazur
, E.
(2006
) Micromachining of bulk glass with bursts of femtosecond laser pulses at variable repetition rates
, Opt. Express
14
, 5279
–5284
.9.
Glezer
, E.N.
, & Mazur
, E.
(1997
) Ultrafast-laser driven micro-explosions in transparent materials
, Appl. Phys. Lett.
71
, 882
–884
.10.
Tan
, B.
, Venkatkrishnan
, K.
, Sivakumar
, N.R.
, & Gan
, G.K.
(2003
) Laser drilling of thick material using femtosecond pulse with a focus of dual-frequency beam
, Optics and Laser Tech.
35
, 199
–202
.11.
Diez-Blanco
, V.
, Siegel
, J.
, Ferrer
, A.
, Ruiz de la
Cruz
, A., & Solis
, J.
, (2007
) Deep subsurface waveguides with circular cross section produced by femtosecond laser writing
, Appl. Phys. Lett.
91
, 051104
.12.
Ferrer
, A.
, Diez-Blanco
, V.
, Ruiz
, A.
, Siegel
, J.
, & Solis
, J.
, (2007
) Deep subsurface optical waveguides produced by direct writing with femtosecond laser pulses in fused silica and phosphate glass
, Appl. Surface Sci.
254
, 1121
–1125
.13.
Mauclair
, C.
, Mermillod-Blondin
, A.
, Huot
, N.
, Audouard
, E.
, & Stoian
, R.
, (2008
) Ultrafast laser writing of homogeneous longitudinal waveguides in glasses using dynamic wavefront correction
, Opt. Express
16
, 5481
–5492
.14.
Gomez
, D.
, Tekniker
, F.
, Goenaga
, I.
, Lizuain
, I.
, & Ozaita
, M.
, (2005
) Femtosecond laser ablation for microfluidics
, Optical Engineering
44
(5
), 051105
.15.
Kim
, T.N.
, Campbell
, K.
, Groisman
, A.
, Kleinfeld
, D.
& Schaffer
, C.B.
, (2005
) Femtosecond laser-drilled capillary integrated into a microfluidic device
, Appl. Phys. Lett.
86
, 201106
.16.
Li
, X.
, Hofmeister
, W.
, Shen
, G.
, Davis
, L.
, & Daniel
, C.
, (2007
) Fabrication and characterization of nanofluidics device using fused silica for single protein molecule detection
, Proceedings of Materials and Processes for Medical Devices (MPMD) Conference and Exposition
, September 23-25
.17.
Farson
, D.F.
, Choi
, H.W.
, Zimmerman
, B.
, Steach
, J.K.
, Chalmers
, J.J.
, Olesik
, S.V.
, & Lee
, L.J.
, (2008
) Femtosecond laser micromachining of dielectric materials for biomedical applications
, J. Micromechanics and Microengineering
18
(3
), 035020
.18.
Ameer-Beg
, S.
, Perrie
, W.
, Rathbone
, S.
, Wright
, J.
, Weaver
, W.
, & Champux
, H.
, (1998
) Femtosecond laser microstructuring of materials
, Appl. Surf. Sci.
129
, 875
–880
.19.
Kononenko
, T.V
, Meier
, M.
, Komlenok
, M.S.
, Pimenov
, S.M.
, Romano
, V.
, Pashinin
, V.P.
, & Konov
, V.I.
, (2008
) Microstructuring of diamond bulk by IR femtosecond laser pulses
. Applied Physics a-Materials Science & Processing
, 90
(4
): p. 645
–651
.20.
Liou
, Y.L.
, Liou
, J.C.
, Huang
, J.H.
, Tai
, N.H.
, Lin
, I.N.
, (2008
) Fabrication and field emission properties of ultra-nanocrystalline diamond lateral emitters
. Diamond and Related Materials.
17
(4-5
): p. 776
–781
.21.
Subramanian
, K.
, Kang
, W.P.
, Davidson
, J.L.
, Howell
, M.
, (2008
) Nanodiamond lateral field emitter devices on thick insulator substrates for reliable high power applications
. Diamond and Related Materials.
17
(4-5
): p. 786
–789
.22.
Tzeng
, Y.F.
, Liu
, K.H.
, Lee
, Y.C.
, Lin
, S.J.
, Lin
, I.N.
, Lee
, C.Y.
, Chiu
, H.T.
, (2007
) Fabrication of an ultra-nanocrystalline diamond-coated silicon wire array with enhanced field-emission performance
. Nanotechnology.
18
(43
).23.
Kang
, W.P.
, Davidson
, J.L.
, Wisitsora-at
, A.
, Wong
, W.M.
, Takalkar
, R.
, Holmes
, K.
, Kerns
, D.V.
, (2004
) Diamond vacuum field emission devices
. Diamond and Related Materials
13
, 1944
–1948
.24.
Subramanian
, K.
, Kang
, W.P.
, Davidson
, J.L.
, Takalkar
, R.S.
, Choi
, B.K.
, Howell
, M.
, Kerns
, D.V.
, (2006
) Enhanced electron field emission from micropatterned pyramidal diamond tips incorporating CH4/H2/N2 plasma-deposited nanodiamond
. Diamond & Related Materials
15
, 1126
–1131
.25.
Bhardwaj
, V.R.
, Rajeev
, P.P.
, Corkum
, P.B.
, Rayner
, D.M.
, (2006
) Strong field ionization inside transparent solids
. J. Phys. B.: At. Mol. Opt. Phys.
39
, S397
–S407
.26.
Gattass
, R.R.
, Mazur
, E.
, (2008
) Femtosecond laser micromachining in transparent materials
. Nature Photonics
2
, 219
–225
.27.
Ref. ‘Synthetic Diamond -Emerging CVD Science and Technology’,
Spear and Dismukes
, Wiley
, NY
, (1994
).
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