Sputter deposition was used to deposit amorphous, 1µm thick, Ti-rich NiTi films on silicon substrates which were annealed at various times and temperatures to alter their microstructure. The effects of heat treatments on the shape memory and mechanical properties of the films were analysed through temperature dependent x-ray diffraction and nanoindentation. These heat treatments were shown to affect the transformation temperatures, recovery ratios and hardness of the films and can be used as groundwork for designing laser processes for the fabrication of functionally graded shape memory devices.

1.
Bellouard
,
Y.
 (
2008
)
Shape memory alloys for Microsystems: A review from a material research perspective
,
Materials Science and Engineering A
481-482
,
582
–
589
https://doi.org/10.1016/j.msea.2007.02.166
Google Scholar
Crossref
Search ADS
 
2.
Wang
,
X.
,
Bellouard
,
Y.
 and
Vlassak
,
J.J.
 (
2005
)
Laser annealing of amorphous NiTi shape memory alloy thin films to locally induce shape memory properties
,
Acta Materialia
53
,
4955
–
4961
https://doi.org/10.1016/j.actamat.2005.07.022
Google Scholar
Crossref
Search ADS
 
3.
Birnbaum
,
A.J.
,
Chung
,
U.-J.
,
Huang
,
X.
,
Ramirez
,
A.G.
,
Polvino
,
S.
 &
Yao
,
Y.L.
 (
2007
)
Melt-mediated laser crystallization of thin film NiTi shape memory alloys
, in
Proceedings of ICALEO – Laser Materials Processing
,
98
–
107
.
Google Scholar
Crossref
Search ADS
 
4.
Ishida
,
A.
,
Takei
,
A.
 &
Miyazaki
,
S.
 (
1993
)
Shape memory thin film of Ti-Ni formed by sputtering
,
Thin Solid Films
228
,
210
–
214
https://doi.org/10.1016/0040-6090(93)90600-T
Google Scholar
Crossref
Search ADS
 
5.
Lee
,
H.
,
Ni
,
H.
,
Wu
,
D.T.
 &
Ramirez
,
A.G.
 (
2005
)
Grain size esitmations from the direct measurement of nucleation and growth
,
Applied Physics Letters
87
,
124102-1
–
3
Google Scholar
 
6.
Paula
,
A.S.
,
Canejo
,
J.P.H.G.
,
Martins
,
R.M.S.
 &
Fernandes
,
B.
 (
2004
)
Effect of thermal cycling on the transformation temperature ranges of a Ni-Ti shape memory alloy
,
Materials Science and Engineering A
378
,
92
–
96
https://doi.org/10.1016/j.msea.2003.11.057
Google Scholar
Crossref
Search ADS
 
7.
Ishida
,
A.
,
Sato
,
M.
 &
Miyazaki
,
S.
 (
1999
)
Mechanical properties of Ti-Ni shape memory thin films formed by sputtering
,
Materials Science and Engineering A
273-275
,
754
–
757
https://doi.org/10.1016/S0921-5093(99)00410-4
Google Scholar
Crossref
Search ADS
 
8.
Firstov
,
G.S.
,
Vitchev
,
R.G.
,
Kumar
,
H.
,
Blanpain
,
B.
 &
Van Humbeeck
,
J.
 (
2002
)
Surface oxidation of NiTi shape memory alloy
,
Biomaterials
23
,
4863
–
4871
https://doi.org/10.1016/S0142-9612(02)00244-2
Google Scholar
Crossref
Search ADS
PubMed
 
9.
Gall
,
K.
,
Dunn
,
M.L.
,
Liu
,
Y.
,
Sehitoglu
,
H.
 &
Chumlyakov
,
Y.I.
 (
2002
)
Micro and macro deformation of single crystal NiTi
,
Transactions of the ASME
124
,
238
–
245
Google Scholar
 
10.
Tall
,
P.D.
,
Ndiaye
,
S.
,
Beye
,
A.C.
,
Zong
,
Z.
,
Soboyejo
,
W.O.
,
Lee
,
H.
,
Ramirez
,
A.G.
 &
Rajan
,
K.
 (
2007
)
Nanoindentation of Ni-Ti thin films
,
Materials and Manufacturing Processes
22
,
175
–
179
https://doi.org/10.1080/10426910601062222
Google Scholar
Crossref
Search ADS
 
11.
Shaw
,
G.A.
 &
Crone
,
W.C.
 (
2004
)
Direct measurement of the nanoscale mechanical properties of NiTi shape memory alloy
, in
Materials Research Society Symposium Proceedings: Mechanical Properties of Nanostructured Materials and Nonocomposites
791
,
Boston, USA
,
215
–
220
Google Scholar
Crossref
Search ADS
 
12.
Shimizu
,
K.
 &
Tadaki
,
T.
 (
1987
) Shape memory effect: mechanism, in
H.
Funakubo
 (ed)
Shape Memory Alloys
,
Gordon and Breach Science Publishers
,
1
–
60
.
Google Scholar
 
13.
Kajiwara
,
S.
,
Kikuchi
,
T.
,
Ogawa
,
K.
,
Matsunaga
,
T.
 &
Miyazaki
,
S.
 (
1996
)
Strengthening of Ti-Ni shape-memory films by coherent subnanometric plate precipitates
,
Philosophical Magazine Letters
74
,
137
–
144
https://doi.org/10.1080/095008396180281
Google Scholar
Crossref
Search ADS
 
14.
Fischer-Cripps
,
A.C.
 (
2004
) Nanoindentation testing, in
F.F.
Ling
 (ed)
Nanoindentation
,
Springer
,
21
–
38
.
Google Scholar
Crossref
Search ADS
 
15.
Ishida
,
A.
,
Sato
,
M.
,
Kimura
,
T.
 &
Sawaguchi
,
T.
 (
2001
)
Effects of composition and annealing on shape memory behavior of Ti-rich Ti-Ni thin films formed by sputtering
,
Materials Transactions JIM
42
,
1060
–
1067
https://doi.org/10.2320/matertrans.42.1060
Google Scholar
Crossref
Search ADS
 
16.
Ishida
,
A.
,
Sato
,
M.
,
Takei
,
A.
 &
Miyazaki
,
S.
 (
1995
)
Effect of heat treatment on shape memory behavior of Ti-rich Ti-Ni thin films
,
Materials Transactions JIM
36
,
1349
–
1355
https://doi.org/10.2320/matertrans1989.36.1349
Google Scholar
Crossref
Search ADS
 
17.
Gabry
,
B.
,
Lexcellent
,
C.
,
No
,
V.H.
 &
Miyazaki
,
S.
 (
2000
)
Thermodynamic modelling of the recovery strains of sputter-deposited shape memory alloys Ti-Ni and Ti-Ni-Cu thin films
,
Thin Solid Films
372
,
118
–
133
https://doi.org/10.1016/S0040-6090(00)01042-7
Google Scholar
Crossref
Search ADS
 
18.
Hamilton
,
R.F.
,
Sehitoglu
,
H.
,
Chumlyakov
,
Y.
 &
Maier
,
H.J.
 (
2004
)
Stress dependence of the hysteresis in single crystal NiTi alloys
,
Acta Materialia
52
,
3383
–
3402
https://doi.org/10.1016/j.actamat.2004.03.038
Google Scholar
Crossref
Search ADS
 
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