Researchers have shown that a simple way to improve the absorption of solar cells consists in irradiating a silicon surface with a series of femtosecond laser pulses under SF6 gas to create a black silicon surface. We have made our Black Silicon with fs laser under vacuum and we have used Plasma Immersion Doping (PIII) to create shallow junctions and take advantage of this better absorption. Therefore we can increase the optical absorption by 56% in the UV and 37% in the IR, compared to a non-texturized silicon surface. The Internal Quantum Efficiency has also been increased, especially in the UV. Therefore the electrical performance is also drastically improved: we observed a 50% increase in the photocurrent.

1.
J. E.
Carey
,
C. H.
Crouch
,
M.
Shen
, and
E.
Mazur
(
2005
)
Opt. Lett.
30
,
1773
.
2.
C.
Wu
,
C. H.
Crouch
,
L.
Zhao
,
J. E.
Carey
,
R.
Younkin
,
J. A.
Levinson
,
E.
Mazur
,
R. M.
Farreli
,
P.
Gothoskar
, and
A.
Karger
(
2001
)
Near-unity below band-gap absorption by microstructured silicon
,
Appl. Phys. Lett.
78
,
1850
1852
3.
A. J.
Pedraza
,
J. D.
Fowlkes
, and
D. H.
Lowndes
(
1999
)
Silicon microcolumn arrays grown by nanosecond pulsed-excimer-laser irradiation
,
Appl. Phys. Lett.
74
,
2322
2324
.
4.
D. H.
Lowndes
,
J. D.
Fowlkes
, and
A. J.
Pedraza
, (
2000
)
Early stages of pulsed-laser growth of silicon microcolumns and microcones in air and SF6
,
Appl. Surf. Sci.
154
,
647
658
.
5.
C. H.
Crouch
,
J. E.
Carey
,
J. M.
Warrender
,
M. J.
Aziz
,
E.
Mazur
, and
F. Y.
Genin
, “
Comparison of structure and properties of femtosecond and nanosecond laser-structured silicon
,”
Appl. Phys. Lett.
84
,
1850
1852
(
2004
).
6.
C. H.
Crouch
,
J. E.
Carey
,
M. Y.
Shen
,
E.
Mazur
, and
F. Y.
Genin
, “
Infrared absorption by sulfur-doped silicon formed by femtosecond laser irradiation
,”
Appl. Phys. A
79
,
1635
1641
(
2004
).
7.
D.
Mills
and
K. W.
Kolasinski
, “
Solidification driven extrusion of spikes during laser melting of silicon pillars
,”
Nanotechnology
17
,
2741
2744
(
2006
).
8.
M.
Halbwax
,
T.
Sarnet
,
Ph.
Delaporte
,
M.
Sentis
,
H.
Etienne
,
F.
Torregrosa
,
V.
Vervisch
,
I.
Perichaud
,
S.
Martinuzzi
(
2007
)
Micro and nano-structuration of silicon by femtosecond laser: application to silicon photovoltaic cells fabrication
,
Thin Solid Films
, doi:.
9.
T.
Sarnet
,
M.
Halbwax
,
R.
Torres
,
P.
Delaporte
,
M.
Sentis
,
S.
Martinuzzi
,
V.
Vervisch
,
F.
Torregrosa
,
H.
Etienne
,
L.
Roux
,
S.
Bastide
(
2008
)
Femtosecond laser for black silicon and photovoltaic cells
,
SPIE Proceedings
Vol.
6881
(PHOTONICS WEST 2008),
19-24/Jan. 2008
San Jose, CA
(DOI: )
10.
T. G.
Kim
,
Jeffrey M.
Warrender
, and
Michael J.
Aziz
(
2006
)
Strong sub-band-gap infrared absorption in silicon supersaturated with sulphur
,
Applied Physics Letters
88
,
241902
.
11.
M.
Tabal
,
M.J.
Aziz
(
2006
)
Excimer laser processing of novel materials for optoelectronics ans spintronics applications
,
SPIE Proc.Photonics west 2006
Vol.
6458
, P
645803-1
to
645803-12
.
12.
V.
Zorba
,
N.
Boukos
,
I.
Zergioti
, and
C.
Fotakis
(
2008
)
Ultraviolet femtosecond, picosecond and nanosecond laser microstructuring of silicon: structural and optical properties
,
Applied Optics
, Vol.
47
, No.
11
/ 10 April 2008
13.
J.
Reif
,
O.
Varlamova
,
F.
Costache
(
2008
)
Femtosecond laser induced nanostructure formation: self-organization control parameters
,
Appl Phys A
, doi .
14.
J.S.
Yoo
,
I.O.
Parm
,
U.
Gangopadhyay
,
Kyunghae
Kim
,
S.K.
Dhungel
,
D.
Mangalaraj
,
Junsin
Yi
(
2006
)
Black silicon layer formation for application in solar cells
,
Solar Energy Materials & Solar Cells
90
,
3085
3093
.
15.
L.A.
Dobrzanski
,
A.
Drygała
,
K.
Gołombek
,
P.
Panek
,
E.
Bielanska
,
P.
Zieba
(
2008
)
Laser surface treatment of multicrystalline silicon for enhancing optical properties
,
journal of materials processing technology
201
,
291
296
.
16.
H.
Angermann
,
J.
Rappich
,
L.
Korte
,
I.
Sieber
,
E.
Conrad
,
M.
Schmidt
,
K.
Hubener
,
J.
Polte
,
J.
Hauschild
(
2008
)
Wet-chemical passivation of atomically flat and structured silicon substrates for solar cell application
,
Applied Surface Science
254
,
3615
3625
.
17.
U.
Gangopadhyaya
,
S.K.
Dhungel
,
A.K.
Mondal
,
H.
Saha
,
J.
Yi
, (
2007
),
Novel low-cost approach for removal of surface contamination before texturization of commercial monocrystalline silicon solar cells
,
Solar Energy Materials & Solar Cells
91
,
1147
1151
.
18.
K.
Tsujino
,
M.
Matsumura
,
Y.
Nishimoto
(
2006
)
Texturization of multicrystalline silicon wafers for solar cells by chemical treatment using metallic catalyst
,
Solar Energy Materials & Solar Cells
90
,
100
110
.
19.
V.
Vervisch
,
D.
Barakel
,
F.
Torregrosa
,
L.
Ottaviani
and
M.
Pasquinelli
(
2006
)
Plasma immersion ion implantation applied to P+N junction solar cells
,
Proceedings of the 16th International conference on Ion Implantation Technology IIIT
, p.
253
256
.
20.
M.
Birnbaum
(
1965
)
Semiconductor Surface Damage Produced by Ruby Lasers
,
Journal of Applied Physics
,
36
,
3688
, 1965.
21.
T.
Sarnet
,
G.
Kerrien
,
N.
Yaakoubi
,
A.
Bosseboeuf
,
E.
Dufour-Gergam
,
D.
Debarre
,
J.
Boulmer
,
K.
Kakushima
,
C.
Laviron
,
M.
Hernandez
,
G.
Venturini
,
T.
Bourouina
(
2005
)
Laser doping for microelectronics and microtechnology
,
Applied Surface Science, Special issue : Laser interactions in Materials : Nanoscale to Mesoscale
, Elsevier Sciences Editor.
This content is only available via PDF.
You do not currently have access to this content.