In this paper we investigate and compare a laser-driven joining process with two different illumination conditions: (i) high speed scanning of a focused beam and (ii) reasonably uniform “flood illumination” of the whole sample. It is shown that the scanning beam not only avoids illuminating the central part of the device, but also provides more uniform heating of the area to be bonded than laser “flood illumination”. We demonstrate bonding of three different packages: (i) LCC (Leadless chip carrier) packages, (ii) AlN and (iii) LTCC (Low temperature co-fired ceramic) substrates to “top-hat” packages, using a scanned beam from a fibre-delivered high power laser diode array to cure an intermediate layer of glass frit. Standard leak testing demonstrates that all those samples have excellent hermetic sealing with leak rates at the level of 10−9 atm·cc/s.
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ICALEO 2008: 27th International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing
October 20–23, 2008
Temecula, California, USA
ISBN:
978-0-912035-12-3
PROCEEDINGS PAPER
Hermetic joining of micro-devices using a glass frit intermediate layer and a scanning laser beam
Qiang Wu;
Qiang Wu
1
Applied Optics and Photonics Group, School of Engineering and Physical Sciences, Heriot-Watt University
EH14 4AS UK
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Norbert Lorenz;
Norbert Lorenz
1
Applied Optics and Photonics Group, School of Engineering and Physical Sciences, Heriot-Watt University
EH14 4AS UK
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Kevin Cannon;
Kevin Cannon
2
GE Aviation Systems, GE Aviation Systems
, Alexandra Way, Ashchurch, Tewkesbury, Glos GL20 8TB, UK
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Changhai Wang;
Changhai Wang
1
Applied Optics and Photonics Group, School of Engineering and Physical Sciences, Heriot-Watt University
EH14 4AS UK
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Andrew J. Moore;
Andrew J. Moore
1
Applied Optics and Photonics Group, School of Engineering and Physical Sciences, Heriot-Watt University
EH14 4AS UK
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Duncan P. Hand
Duncan P. Hand
1
Applied Optics and Photonics Group, School of Engineering and Physical Sciences, Heriot-Watt University
EH14 4AS UK
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Published Online:
October 01 2008
Citation
Qiang Wu, Norbert Lorenz, Kevin Cannon, Changhai Wang, Andrew J. Moore, Duncan P. Hand; October 20–23, 2008. "Hermetic joining of micro-devices using a glass frit intermediate layer and a scanning laser beam." Proceedings of the ICALEO 2008: 27th International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing. ICALEO 2008: 27th International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing. Temecula, California, USA. (pp. M305). ASME. https://doi.org/10.2351/1.5061370
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