In this paper we investigate and compare a laser-driven joining process with two different illumination conditions: (i) high speed scanning of a focused beam and (ii) reasonably uniform “flood illumination” of the whole sample. It is shown that the scanning beam not only avoids illuminating the central part of the device, but also provides more uniform heating of the area to be bonded than laser “flood illumination”. We demonstrate bonding of three different packages: (i) LCC (Leadless chip carrier) packages, (ii) AlN and (iii) LTCC (Low temperature co-fired ceramic) substrates to “top-hat” packages, using a scanned beam from a fibre-delivered high power laser diode array to cure an intermediate layer of glass frit. Standard leak testing demonstrates that all those samples have excellent hermetic sealing with leak rates at the level of 10−9 atm·cc/s.

1.
L.
Lin
,
Y. T.
Cheng
, and
K.
Najafi
, “
Formation of silicon–gold eutectic bond using localized heating method
,”
Jpn. J. Appl. Phys. 2, Lett.
, vol.
37
, no.
11B
, pp.
1412
1414
,
Nov
.
1998
.
2.
Y. T.
Cheng
,
W. T.
Hsu
,
K.
Najafi
,
C. T. C.
Nguyen
, and
L.
Lin
, “
Vacuum packaging technology using localized aluminum/silicon-to-glass bonding
,”
J. Microelectromech. Syst.
, vol.
11
, no.
5
, pp.
556
565
,
Oct
.
2002
.
3.
Y. T.
Cheng
,
L.
Lin
, and
K.
Najafi
, “
Localized silicon fusion and eutectic bonding for MEMS fabrication and packaging
,”
J. Microelectromech. Syst.
, vol.
9
, no.
1
, pp.
3
8
,
2000
.
4.
R. J. K.
Wassink
,
Soldering in Electronics
.
Ayr, U.K
.:
Electrochemical Publications
,
1984
.
5.
H.
Noh
,
K.
Moon
,
A.
Cannon
,
P. J.
Hesketh
, and
C. P.
Wong
, “
Wafer bonding using microwave heating of parylene for MEMS packaging
,” in
Proc. IEEE Int. Conf. Electron. Compon. and Technol.
,
2004
, vol.
1
, pp.
924
930
.
6.
H. A.
Yang
,
M.
Wu
, and
W.
Fang
, “
Localized induction heating solder bonding for wafer level MEMS packaging
,” in
Proc. IEEE Int. Conf. Micro Electro Mech. Syst.
,
2004
, pp.
729
732
.
7.
Chen
,
M. X.
;
Yuan
,
L. L.
;
Liu
,
S.
(
2007
)
Research on low-temperature anodic bonding using induction heating
.
Sensors and Actuators A-Physical
133
,
266
269
8.
C.
Barbatti
,
J.
Garcia
,
G.
Liedl
,
A.
Pyzalla
, “
Joining of cemented carbides to steel by laser beam welding
”,
MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK
38
(
11
):
907
914
NOV
2007
9.
Xiujing
Liu
, “
Joining dissimilar metal magnesium and aluminum by laser
”,
RARE METALS
26
:
175
179
Sp. Iss. SI,
AUG
2007
10.
W.
Watanabe
,
S.
Onda
,
T.
Tamaki
,
K.
Itoh
, “
Direct joining of glass substrates by 1 kHz femtosecond laser pulses
”,
APPLIED PHYSICS B-LASERS AND OPTICS
87
(
1
):
85
89
MAR
2007
11.
A.W.Y.
Tan
,
F.E.H.
Tay
, “
Localized laser assisted eutectic bonding of quartz and silicon by Nd : YAG pulsed-laser
”,
SENSORS AND ACTUATORS A-PHYSICAL
120
(
2
):
550
561
MAY
17
2005
12.
Alexandre
Mathieu
,
Rajashekar
Shabadi
,
Alexis
Deschamps
,
Michel
Suery
,
Simone
Mattei
,
Dominique
Grevey
,
Eugen
Cicala
, “
Dissimilar material joining using laser (aluminum to steel using zinc-based filler wire
)”,
OPTICS AND LASER TECHNOLOGY
39
(
3
):
652
661
APR
2007
13.
U. M.
Mescheder
,
M.
Alavi
,
K.
Hiltmann
,
C.
Lietzau
,
C.
Nachtigall
, and
H.
Sandmaier
, “
Local laser bonding for low temperature budget
,”
Sens. Actuators A, Phys.
, vol.
97/98
, pp.
422
427
,
2002
.
14.
C.
Luo
and
L.
Lin
, “
The application of nanosecond-pulsed laser welding technology in MEMS packaging with a shadow mask
,”
Sens. Actuators A, Phys.
, vol.
97/98
, pp.
398
404
,
2002
.
15.
A.
Nishimoto
,
M.
Ando
,
M.
Takahashi
,
M.
Aritoshi
,
K.
Akamatsu
,
K.
Ikeuchi
,
JOURNAL OF THE JAPAN INSTITUTE OF METALS
67
(
10
):
538
546
OCT
2003
16.
F.
Bardin
,
S.
Kloss
,
C.
Wang
,
A.J.
Moore
,
A.
Jourdain
,
I.D.
Wolf
,
D.P.
Hand
, “
Laser bonding of glass to silicon using polymer for Microsystems packaging
”,
Journal of Microelectromechanical systems
, vol.
16
(
3
):
571
580
,
2007
17.
C.
Dresbach
,
A.
Krombholz
,
M.
Ebert
,
J.
Bagdahn
, “
Mechanical properties of glass frit bonded micro packages
”,
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
12
(
5
):
473
480
MAR
2006
18.
R.
Knechtel
,
M.
Wiemer
,
J.
Fromel
, “
Wafer level encapsulation of microsystems using glass frit bonding
”,
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
12
(
5
):
468
472
MAR
2006
19.
R.
Knechtel
, “
Glass frit bonding: an universal technology for wafer level encapsulation and packaging
”,
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
12
(
1-2
):
63
68
DEC
2005
20.
D.
Sparks
,
S.
Massoud-Ansari
,
N.
Najafi
, “
Long-term evaluation of hermetically glass frit sealed silicon to Pyrex wafers with feedthroughs
”,
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
15
(
8
):
1560
1564
AUG
2005
21.
Z.
Sun
,
D.
Pan
,
J.
Wei
,
C.K.
Wong
, “
Ceramics bonding using solder glass frit
”,
JOURNAL OF ELECTRONIC MATERIALS
33
(
12
):
1516
1523
DEC
2004
22.
Qiang
Wu
,
Norbert
Lorenz
,
Kevin
Cannon
,
Changhai
Wang
,
Andrew J.
Moore
and
Duncan P.
Hand
, “
Laser based hermetic joining with glass frit intermediate layer
”, in preparation.
This content is only available via PDF.
You do not currently have access to this content.