Microscale Laser Shock Processing (μLSP) can generate compressive residual stress in Micro Electromechanical Systems (MEMS) components through laser-induced plasma and pressure pulse for improving fatigue performance and wear resistance. It’s the generation of shock wave that produces plastic deformation and residual stress. For the first time, the propagation laws of shock wave in material treated by microscale laser beam were researched, and the influence factors, including the selected path and its mode, length of selected path, radius of the laser beam, laser intensity and number of shock impact, were discussed, which compared with ones of millimeter level for the laws of propagation and attenuation. The thickness of target material suitable for measuring shock wave was proved theoretically. All the results established theoretical foundation for the research and experiment of stress wave in materials for μLSP.
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