As a high density and precision energy source, laser has been a powerful tool in microscale material processing, such as micro channel fabrication, micro hole drilling, micro milling of 3D structures, 3D micro deposition, etc. This paper reviews how to achieve the desired spatial resolutions, highlights some of the emerging industrial applications of laser micro/nano material processing, followed by the discussion of practical challenges.

Topics
Microscale materials
1.
Alting
,
L.
,
Kimura
,
F.
, and
Hansen
,
H.N.
, (
2003
) “
Micro-engineering
,”
CIRP Annals - Manufacturing Technology
, v
52
, n
2
, 2003, p
635
–
657
.
https://doi.org/10.1016/S0007-8506(07)60208-X
Google Scholar
Crossref
Search ADS
 
2.
LaPedus
,
Mark
 (
2006
)
Intel pushes out EUV lithography
.
EETimes.
Retrieved on 2006-02-22.
Google Scholar
 
4.
Ostendorf
,
Andreas
 (
2006
) “
From Micro- to Nanolithography by Direct Laser Writing
“,
PhAST 2006 presentation.
Google Scholar
 
5.
Wang
,
L.
,
Uppuluri
,
S. M.
,
Jin
,
E. X.
 and
Xu
,
X.
 (
2006
), “
Nanolithography using high transmission nanoscale bowtie apertures
,”
Nano Letters
, Vol.
6
(
3
), pp.
361
–
364
.
https://doi.org/10.1021/nl052371p
Google Scholar
Crossref
Search ADS
PubMed
 
6.
Adams
,
W.
,
Jaffe
,
A.
 and
Smalley
,
R.
 (
2006
), “Novel Energy applications of Nano Technology,”
NSTI Nanotech 2006
,
Boston, MA
, May 2006.
Google Scholar
 
7.
Tuckerman
D.B.
 and
Pease
,
R.F.W.
, (
1981
)
High-performance heat sinking for VLSI
,
IEEE Electron Device Lett.
2
(1981), pp.
126
–
129
https://doi.org/10.1109/EDL.1981.25367
Google Scholar
Crossref
Search ADS
 
8.
Liu
,
C.W.
,
Gau
,
C.
,
Ko
,
H.S.
,
Yang
,
C.S.
 and
Dai
,
B.T.
, (
2006
), “
Fabrication challenges for a complicated micro-flow channel system at low temperature process
,”
Sensors and Actuators A: Physical
, Volumes
130-131
, 14 August 2006, pp
575
–
582
.
https://doi.org/10.1016/j.sna.2005.09.009
Google Scholar
Crossref
Search ADS
 
9.
Paul
,
B.
, and
Peterson
,
R.
 (
1999
) “
Microlamination for Microtechnology-based Energy, Chemical and Biological Systems
,” AES-Vol.
39
,
Proceedings of the ASME, Advanced Energy Systems Division American Society of Mechanical Engineers
,
New York
Google Scholar
Crossref
Search ADS
 
10.
Ke
,
K.
,
Hasselbrink
,
E. F
Jr. and
Hunt
,
A. J.
 (
2005
) “
Rapidly prototyped three-dimensional nanofluidic channel networks in glass substrate
,”
Anal. Chem.
2005,
77
,
5083
–
5088
https://doi.org/10.1021/ac0505167
Google Scholar
Crossref
Search ADS
PubMed
 
This content is only available via PDF.
© 2006 Laser Institute of America.
2006
Laser Institute of America
You do not currently have access to this content.