Microstructures formation on titanium (Ti) plate by femtosecond laser ablation was reported. Laser fluence was varied from 0.5 to 2.0 J/cm2 with the period of 0.5 J/cm2. The number of laser pulses was changed from 10 to 500 pulses at each laser fluence. In the middle region of the laser ablation area, periodic nanostructures and microstructures were formed except for the laser fluence of 0.5 J/cm2. The crystal structure of the plate irradiated with the laser at 2.0 J/cm2 was evaluated using the transmission electron microscope (TEM). The analysis indicated that the phase of the Ti was changed from α to β in the region.
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