Laser-induced backside wet etching (LIBWE) method has been developed as a technique for micromachining of transparent materials. Such technique can be applied for fabricating microfluidic devices used as Lab on a Chip or total microanalysis system (μTAS). In such devices, various functions are integrated onto one chip. Microstructure with 1μm resolution fabricated within microfluidic channels can afford additional functions to the chip. Color-encoded microbeads with surface functional groups randomly arranged in the microstructure can be used for bioarray analyses. We have fabricated a novel microfluidic device incorporating two-dimensional array of microbeads with 10 μm diameter. The performance of the microfluidic bead array was confirmed by a capturing experiment of DNA.
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