Effect of wavelength on machining characteristics of aluminum nitride in micro-drilling using Q-switched YAG harmonics was experimentally investigated. The depth of drilled hole increases with the decrease of wavelength, since photon energy and absorptivity becomes higher with decreasing the wavelength of laser beam. Besides, the energy loss by the plasma in laser processing decreases with decreasing the wavelength. Therefore, shorter wavelength is more effective in order to drill the micro-hole with high aspect ratio, when micro hole of high aspect ratio is drilled. Moreover, it is made it clear that the drilled depth under vacuum condition is deeper than that under the atmosphere pressure condition, since the removal of debris is carried out more efficiently compared the atmosphere pressure and assist gas supplying condition.

1.
N.
Miyajima
 (
1994
)
New Ceramics
,
Chijin-shokan
,
231
pp.
Google Scholar
 
2.
Mills
DL
,
Nonlinear Optics
(
1991
)
New York
springer-Verlag
.
Google Scholar
Crossref
Search ADS
 
3.
Y.
Ito
,
S.
Nakamura
 and
I.
Koguo
 (
1999
)
Laser ablation of aluminum –Investigation by high-speed imaging with ns laser-
Proceedings of JSEME annual meeting
,
111
–
114
.
Google Scholar
 
4.
O.
Imanaka
 (
1987
)
Machining Handbook of Ceramics
,
Kensetusangyo-chousakai
,
75
pp.
Google Scholar
 
5.
S.
Nakai
 (
1991
)
Laser Engineering
,
Ohm-sha
,
91
pp.
Google Scholar
 
This content is only available via PDF.
© 2006 Laser Institute of America.
2006
Laser Institute of America
You do not currently have access to this content.