Yttria-stabilized zirconia (YSZ) films were deposited on glass substrates at the room temperature with a conventional pulsed laser deposition (PLD) by using KrF excimer laser with a wavelength of 248nm. The surface morphology and mechanical properties of YSZ films were investigated by atomic force microscope (AFM), scanning electron microscope (SEM) and nano indentation test.
The film surface shown in SEM image is generally smooth and dense though some submicron and micron size pores and dents were observed. More information of the surface morphology was obtained from the AFM. The relative height difference between peaks and valleys shown in the AFM images is usually 20∼40nm, and high peak regions where the height difference of 50∼60nm were locally observed. The measured root mean square (Rms) and mean roughness (Ra) for the given area of 5u5Pm2 are in the range of 3.4∼6.4nm and 2.5∼5nm respectively.
Young’s modulus and hardness were measured to investigate mechanical properties of the films by nano indentation test. The measured modulus is about 80∼100Gpa and hardness is about 8.7∼11Gpa.