3-D biomimetic micro-channel network by laser direct writing Available to Purchase

Nanosecond and femtosecond near IR laser direct write is a useful tool for fabricating 3D, multiple-level microfluidic structures. Using a diode-pumped nanosecond fundamental Nd:YAG laser, multi-depth, multi-width microstructures on silicon were fabricated without lithography-based technology. The molten material inside the microchannel was ejected by a modified assist gas and thus the amount of laser ablation was increased. The solidified molten material and the debris build-up due to the strong thermal reaction of silicon to the nanosecond IR laser pulse was cleaned up with chemical wet etching in HF and HNO₃ solution. Micromachining experiments were also done using a femtosecond fiber laser. Microchannels ranging from 2-20¼m could be fabricated using the femtosecond laser. The usefulness of laser micromachining was demonstrated by realizing a semicircular cross-sectional microchannel, which is difficult to accomplish with the lithography-based technology. Rapid prototyping of an artificial vascular network having variable depth and width was carried out and a fluid flow in the PDMS replica of the network was visualized.