Comprehensive results on femtosecond-laser microstructuring of silicon, tungsten carbide hard metal, fused silica and Pyrex glass using a Ti: Sapphire-Laser with regenerative amplifier are presented. Based on our studies of the ablation behaviour of those materials in dependence of the laser parameters three-dimensional microstructures have been produced and characterized by scanning electron microscopy. The quality of those microstructures that could be obtained for each material will be shown and discussed.
REFERENCES
1.
Furusawa
, K.
, Takahashi
, K.
, Kumagai
, H.
, Midorikawa
, K.
, Obara
, M.
, Ablation characteristics of Au, Ag, and Cu metals using a femtosecond Ti:sapphire laser
, Appl. Phys. A
69
[Suppl.] (1999
) 359
– 366
.2.
Zhu
, X.
, Naumov
, A.Yu.
, Villeneuve
, D.M.
, Corkum
, P.B.
, Influence of laser parameters and material properties on micro drilling with femtosecond laser pulses
, Appl. Phys. A
69
[Suppl.] (1999
) 367
– 371
.3.
Juodzakis
, S.
, Okuno
, H.
, Kujime
, N.
, Matsuo
, S.
, Musawa
, H.
, Hole drilling in stainless steel and silicon by femtosecond pulses at low pressure
, Appl. Phys. A
79
(2004
) 1555
– 1559
.4.
Henyk
, M.
, Vogel
, N.
, Wolfframm
, D.
, Tempel
, A.
, Reif
, J.
, Femtosecond laser ablation from dielectric materials: Comparison to arc discharge erosion
, Appl. Phys. A
69
[Suppl.] (1999
) 355
– 358
.5.
Ashkenasi
, D.
, Stoian
, R.
, Rosenfeld
, A.
, Single and multiple ultrashort laser pulse ablation threshold of Al2O3 (corundum) at different etch phases
, Appl. Surf. Sci.
154–155
(2000
) 40
–46
.6.
Lenzer
, M.
, Krausz
, F.
, Krüger
, J.
, Kautek
, W.
, Photoablation with sub – 10 fs laser pulses
, Appl. Surf. Sci.
154 – 155
(2000
) 11
– 16
.7.
Ameer-Beg
, S.
, Perrie
, W.
, Rathbone
, S.
, Wright
, J.
, Weaver
, W.
, Champoux
, H.
, Femtosecond laser microstructuring of materials
, Appl. Surf. Sci.
127-129
(1998
) 875
–880
.8.
Krüger
, J.
, Kautek
, W.
, Lenzner
, M.
, Sartania
, S.
, Spielmann
, C.
, Krausz
, F.
, Laser micromachining of barium aluminium borosilicate glass with pulse durations between 20 fs and 3 ps
, Appl. Surf. Sci.
127-129
(1998
) 892
–898
.9.
Baudach
, S.
, Bonse
, J.
, Kautek
, W.
, Ablation experiments on polyimide with femtosecond laser pulses
, Appl. Phys. A
69
[Suppl.] (1999
) 395
– 398
.10.
Baudach
, S.
, Bonse
, J.
, Krüger
, J.
, Kautek
, W.
, Ultrashort pulse laser ablation of polycarbonate and PMMA
, Appl. Surf. Sci.
154 – 155
(2000
) 555
–560
.11.
Streltsov
, A.M.
, Jinendra
, K.R.
, Gaeta
, A.L.
, (1998
), Femtosecond autocorrelation measurements based on two-photon conductivity in fused silica
, Optics Letters
, Vol. 23
, No. 10
, 798
–800
.12.
Rayner
, D.M.
, Naumov
, A.
, Corkum
, P.G.
, (2005
), Ultrashort pulse non-linear optical absorption in transparent media
, Optics Express
, Vol. 13
, No. 9
, 3208
–3217
.13.
Glass catalogue of Praezisions Glas & Optik GmbH
06/2005, http://www.pgo-online.com.
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2005
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