Optical near-field enhancement obtained between the spheres and substrate by irradiating with laser beam can be used for nano-patterning the hard-to-machine bulk silicon carbide (SiC). For this study a monolayer of silica (SiO2) spheres of 1.76 µm and 640 nm diameter are deposited on the SiC substrate and then irradiated with an Nd:YAG laser of wavelength 355 nm and 532 nm. Scanning electron microscope and atomic force microscope are used to characterize the features. It was found that the features obtained were having diameters around 150 to 450 nm and the depths varying from 70 to 220 nm.
REFERENCES
1.
Reitano
, R.
, Baeri
, P.
, & Marino
, N.
(1996
) Excimer Laser Induced Thermal Evaporation and Ablation of Silicon Carbide
, Applied Surface Science
, Vol. 96-98
, pp. 302
–308
.2.
Stevenson
, R.
(2004
) SiC Power Devices – STMicroelectronics is set to Drive SiC-device Competition
, Compound Semiconductors
, November, pp. 27
–30
.3.
Zhang
, J.
, Sugloka
, K.
, Wada
, S.
, Tashiro
, H.
, & Toyoda
, K.
(1997
) Direct Photoetching of Single Crystal SiC by VUV-266 nm Multiwavelength Laser Ablation
, Applied Physics. A
, Vol. 64
, pp. 367
–371
.4.
Sciti
, D.
, & Bellosi
, A.
(2001
) Laser-Induced Surface Drilling of Silicon Carbide
, Applied Surface Science
, Vol. 180
, pp. 92
–101
.5.
Dong
, Y.
, & Molian
, P.
(2003
) Femtosecond Pulsed Laser Ablation of 3C-SiC Thin Film on Silicon
, Applied Physics. A
, Vol. 77
, pp. 839
–846
.6.
Sundaram
, S. K.
, & Mazur
, E.
(2002
) Inducing and Probing Non-Thermal Transitions in Semiconductors Using Femtosecond Laser Pulses
, Nature Materials
, Vol. 1
, pp. 217
–224
.7.
Dolgaev
, S. I.
, Lyalin
, A. A.
, Shafeev
, G. A.
, & Voronov
, V. V.
(1996
) Fast Etching and Metallization of SiC Ceramics with Copper-Vapor-Laser Radiation
, Applied Physics. A
, Vol. 63
, pp. 75
–79
.8.
Sugioka
, K.
, Obata
, K.
, Mdorikawa
, K.
, Hong
, M. H.
, Wu
, D. J.
, Wong
, L. L.
, Lu
, Y. F.
, & Chong
, T. C.
(2002
) Advanced Materials Processing Based on Interaction of Laser Beam and a Medium
, Journal of Photochemistry and Photobiology A
, Vol. 158
, pp. 171
–178
.9.
Glezer
, E. N.
, & Mazur
, E.
(1997
) Ultrafast-Laser Driven Micro-explosions in Transparent Materials
, Applied Physics Letters.
, Vol. 71
(7
), pp. 882
–884
.10.
Tong
, H. D.
, Jansen
, H. V.
, Gadgil
, V. J.
, Bostan
, C. G.
, Berenschot
, E.
, Van Rijn
, C. J. M.
, & Elwenspoek
, M.
(2004
) Silicon Nitride Nanosieve Membrane
, Nano Letters
, Vol. 4
(2
), pp. 283
–287
.11.
Halfpenny
, D. R.
, & Kane
, D. M.
(1999
) A quantitative analysis of single pulse ultraviolet dry laser cleaning
, Journal of Applied Physics
, Vol. 86
, pp. 6641
–6646
.12.
Theppakuttai
, S.
, Lu
, Y.
, & Chen
, S. C.
(2004
) Near-field enhanced massively parallel nanoscale modification of solids
, Transactions of NAMRI/SME
, Vol. 32
, pp. 33
–38
.13.
Munzer
, H. J.
, Mosbacher
, M.
, Bertsch
, M.
, Zimmermann
, J.
, Leiderer
, P.
, & Boneberg
, J.
(2001
) Local Field Enhancement Effects for Nanostructuring of Surfaces
, Journal of Microscopy
, Vol. 202
, pp. 129
–135
.14.
Watanabe
, O.
, Ikawa
, T.
, Hasegawa
, M.
, Tsuchimori
, M.
, & Kawata
, Y.
(2001
) Nanofabrication induced by near-field exposure from a nanosecond laser pulse
, Applied Physics Letters
, Vol. 79
, p. 1366
.15.
Lu
, Y.
, Theppakuttai
, S.
, & Chen
, S. C.
(2003
) Marangoni Effect in Nanosphere-enhanced Laser Nanopatterning of Silicon
, Applied Physics Letters
, Vol. 82
(23
), pp. 4143
–4145
.16.
Theppakuttai
, S.
, & Chen
, S. C.
(2003
) Nanoscale Surface Modification of Glass Using a 1064 nm Pulsed Laser
, Applied Physics Letters
, Vol. 83
(4
), pp. 758
–760
.17.
Theppakuttai
, S.
, & Chen
, S. C.
(2004
) Submicron Ripple Formation on a Glass Substrate upon Laser-nanoparticle Interaction
, Journal of Applied Physics
, Vol. 95
(9
), pp. 5049
–5052
.18.
Korte
, F.
, Serbin
, J.
, Koch
, J.
, Egbert
, A.
, Fallnich
, C.
, Ostendorf
, A.
, & Chichkov
, B. N.
(2003
) Towards Nanostructuring with Femtosecond Laser Pulses
, Applied Physics. A
, Vol. 77
, pp. 229
–235
.19.
Schaffer
, C. B.
, Brodeur
, A.
, & Mazur
, E.
(2001
) Laser-induced Breakdown and Damage in Bulk Transparent Materials Induced by Tightly Focused Femtosecond laser pulses
, Meas. Sci. Technol.
, Vol. 12
, pp. 1784
–1794
.20.
Itoh
, N.
, (1997
) Bond Scission Induced by Electronic Excitations in Solids: A Tool for Nanomanipulation
, Nuclear Instruments and Methods in Physics. B
, Vol. 122
, pp. 405
–409
.
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